Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Characterization of Ion Implanted and Annealed GaAs for an Integrated Circuit Process

J.E. Van Leeuwen

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M86/17
1986


BibTeX citation:

@techreport{Van Leeuwen:M86/17,
    Author = {Van Leeuwen, J.E.},
    Title = {Characterization of Ion Implanted and Annealed GaAs for an Integrated Circuit Process},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1986},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1986/655.html},
    Number = {UCB/ERL M86/17}
}

EndNote citation:

%0 Report
%A Van Leeuwen, J.E.
%T Characterization of Ion Implanted and Annealed GaAs for an Integrated Circuit Process
%I EECS Department, University of California, Berkeley
%D 1986
%@ UCB/ERL M86/17
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1986/655.html
%F Van Leeuwen:M86/17