Characterization of Ion Implanted and Annealed GaAs for an Integrated Circuit Process
J.E. Van Leeuwen
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M86/17
1986
BibTeX citation:
@techreport{Van Leeuwen:M86/17,
Author = {Van Leeuwen, J.E.},
Title = {Characterization of Ion Implanted and Annealed GaAs for an Integrated Circuit Process},
Institution = {EECS Department, University of California, Berkeley},
Year = {1986},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1986/655.html},
Number = {UCB/ERL M86/17}
}
EndNote citation:
%0 Report %A Van Leeuwen, J.E. %T Characterization of Ion Implanted and Annealed GaAs for an Integrated Circuit Process %I EECS Department, University of California, Berkeley %D 1986 %@ UCB/ERL M86/17 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1986/655.html %F Van Leeuwen:M86/17