Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Characterization of Inorganic Resist for VLSI Fabrication

Wingyu Leung

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M85/76
1985

Advisor: Andrew R. Neureuther


BibTeX citation:

@phdthesis{Leung:M85/76,
    Author = {Leung, Wingyu},
    Title = {Characterization of Inorganic Resist for VLSI Fabrication},
    School = {EECS Department, University of California, Berkeley},
    Year = {1985},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1985/564.html},
    Number = {UCB/ERL M85/76}
}

EndNote citation:

%0 Thesis
%A Leung, Wingyu
%T Characterization of Inorganic Resist for VLSI Fabrication
%I EECS Department, University of California, Berkeley
%D 1985
%@ UCB/ERL M85/76
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1985/564.html
%F Leung:M85/76