Characterization of Inorganic Resist for VLSI Fabrication

Wingyu Leung

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M85/76
1985

Advisor: Andrew R. Neureuther


BibTeX citation:

@phdthesis{Leung:M85/76,
    Author = {Leung, Wingyu},
    Title = {Characterization of Inorganic Resist for VLSI Fabrication},
    School = {EECS Department, University of California, Berkeley},
    Year = {1985},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1985/564.html},
    Number = {UCB/ERL M85/76}
}

EndNote citation:

%0 Thesis
%A Leung, Wingyu
%T Characterization of Inorganic Resist for VLSI Fabrication
%I EECS Department, University of California, Berkeley
%D 1985
%@ UCB/ERL M85/76
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1985/564.html
%F Leung:M85/76