Specifying Integrated Circuit Photolithography Processes Using Heuristic and Algorithmic Techniques (Computer-Aided Design, Expert System)
Michael F. Klein
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M85/73
1985
Advisor: David A. Hodges
BibTeX citation:
@phdthesis{Klein:M85/73,
Author = {Klein, Michael F.},
Title = {Specifying Integrated Circuit Photolithography Processes Using Heuristic and Algorithmic Techniques (Computer-Aided Design, Expert System)},
School = {EECS Department, University of California, Berkeley},
Year = {1985},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1985/560.html},
Number = {UCB/ERL M85/73}
}
EndNote citation:
%0 Thesis %A Klein, Michael F. %T Specifying Integrated Circuit Photolithography Processes Using Heuristic and Algorithmic Techniques (Computer-Aided Design, Expert System) %I EECS Department, University of California, Berkeley %D 1985 %@ UCB/ERL M85/73 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1985/560.html %F Klein:M85/73