Electrical Engineering and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Synchronous Electron Beam Diagnostic for Plasma Etching Discharges

C.P. Chang and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M85/38
1985

BibTeX citation:

@techreport{Chang:M85/38,
    Author = {Chang, C.P. and Lieberman, Michael A.},
    Title = {Synchronous Electron Beam Diagnostic for Plasma Etching Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1985},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1985/504.html},
    Number = {UCB/ERL M85/38}
}

EndNote citation:

%0 Report
%A Chang, C.P.
%A Lieberman, Michael A.
%T Synchronous Electron Beam Diagnostic for Plasma Etching Discharges
%I EECS Department, University of California, Berkeley
%D 1985
%@ UCB/ERL M85/38
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1985/504.html
%F Chang:M85/38