Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Electron Beam Lithography for Josephson Junction Fabrication

N.K.L. Raja

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M84/82
1984


BibTeX citation:

@techreport{Raja:M84/82,
    Author = {Raja, N.K.L.},
    Title = {Electron Beam Lithography for Josephson Junction Fabrication},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1984},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1984/387.html},
    Number = {UCB/ERL M84/82}
}

EndNote citation:

%0 Report
%A Raja, N.K.L.
%T Electron Beam Lithography for Josephson Junction Fabrication
%I EECS Department, University of California, Berkeley
%D 1984
%@ UCB/ERL M84/82
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1984/387.html
%F Raja:M84/82