N.K.L. Raja
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M84/82
September 1984
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/ERL-m-84-82.pdf
BibTeX citation:
@techreport{Raja:M84/82, Author = {Raja, N.K.L.}, Title = {Electron Beam Lithography for Josephson Junction Fabrication}, Institution = {EECS Department, University of California, Berkeley}, Year = {1984}, Month = {Sep}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/387.html}, Number = {UCB/ERL M84/82} }
EndNote citation:
%0 Report %A Raja, N.K.L. %T Electron Beam Lithography for Josephson Junction Fabrication %I EECS Department, University of California, Berkeley %D 1984 %@ UCB/ERL M84/82 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/387.html %F Raja:M84/82