Electron Beam Lithography for Josephson Junction Fabrication
N.K.L. Raja
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M84/82
1984
BibTeX citation:
@techreport{Raja:M84/82,
Author = {Raja, N.K.L.},
Title = {Electron Beam Lithography for Josephson Junction Fabrication},
Institution = {EECS Department, University of California, Berkeley},
Year = {1984},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1984/387.html},
Number = {UCB/ERL M84/82}
}
EndNote citation:
%0 Report %A Raja, N.K.L. %T Electron Beam Lithography for Josephson Junction Fabrication %I EECS Department, University of California, Berkeley %D 1984 %@ UCB/ERL M84/82 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1984/387.html %F Raja:M84/82