Electron Beam Lithography for Josephson Junction Fabrication

N.K.L. Raja

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M84/82
1984


BibTeX citation:

@techreport{Raja:M84/82,
    Author = {Raja, N.K.L.},
    Title = {Electron Beam Lithography for Josephson Junction Fabrication},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1984},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1984/387.html},
    Number = {UCB/ERL M84/82}
}

EndNote citation:

%0 Report
%A Raja, N.K.L.
%T Electron Beam Lithography for Josephson Junction Fabrication
%I EECS Department, University of California, Berkeley
%D 1984
%@ UCB/ERL M84/82
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1984/387.html
%F Raja:M84/82