Characterization and Modeling of Positive Photoresist

Deok J. Kim

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M84/65
1984

Advisor: William G. Oldham


BibTeX citation:

@phdthesis{Kim:M84/65,
    Author = {Kim, Deok J.},
    Title = {Characterization and Modeling of Positive Photoresist},
    School = {EECS Department, University of California, Berkeley},
    Year = {1984},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1984/360.html},
    Number = {UCB/ERL M84/65}
}

EndNote citation:

%0 Thesis
%A Kim, Deok J.
%T Characterization and Modeling of Positive Photoresist
%I EECS Department, University of California, Berkeley
%D 1984
%@ UCB/ERL M84/65
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1984/360.html
%F Kim:M84/65