Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Characterization and Modeling of Positive Photoresist

Deok J. Kim

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M84/65
1984

Advisor: William G. Oldham


BibTeX citation:

@phdthesis{Kim:M84/65,
    Author = {Kim, Deok J.},
    Title = {Characterization and Modeling of Positive Photoresist},
    School = {EECS Department, University of California, Berkeley},
    Year = {1984},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1984/360.html},
    Number = {UCB/ERL M84/65}
}

EndNote citation:

%0 Thesis
%A Kim, Deok J.
%T Characterization and Modeling of Positive Photoresist
%I EECS Department, University of California, Berkeley
%D 1984
%@ UCB/ERL M84/65
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1984/360.html
%F Kim:M84/65