Analysis of Backscattered Electron Signals for X-ray Mask Inspection

Michael G. Rosenfield

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M84/16
1984

Advisor: Andrew R. Neureuther

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BibTeX citation:

@phdthesis{Rosenfield:M84/16,
    Author = {Rosenfield, Michael G.},
    Title = {Analysis of Backscattered Electron Signals for X-ray Mask Inspection},
    School = {EECS Department, University of California, Berkeley},
    Year = {1984},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1984/270.html},
    Number = {UCB/ERL M84/16}
}

EndNote citation:

%0 Thesis
%A Rosenfield, Michael G.
%T Analysis of Backscattered Electron Signals for X-ray Mask Inspection
%I EECS Department, University of California, Berkeley
%D 1984
%@ UCB/ERL M84/16
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1984/270.html
%F Rosenfield:M84/16

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