Michael G. Rosenfield
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M84/16
January 1984
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/ERL-m-84-16.pdf
Advisor: Andrew R. Neureuther
BibTeX citation:
@phdthesis{Rosenfield:M84/16, Author = {Rosenfield, Michael G.}, Title = {Analysis of Backscattered Electron Signals for X-ray Mask Inspection}, School = {EECS Department, University of California, Berkeley}, Year = {1984}, Month = {Jan}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/270.html}, Number = {UCB/ERL M84/16} }
EndNote citation:
%0 Thesis %A Rosenfield, Michael G. %T Analysis of Backscattered Electron Signals for X-ray Mask Inspection %I EECS Department, University of California, Berkeley %D 1984 %@ UCB/ERL M84/16 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/270.html %F Rosenfield:M84/16