Technical Reports - 1981

Multiple Stochastic Integrals: Projection and Iteration (M81/100)
Bruce Hajek and Eugene Wong

Simulation of Developed Resist Profiles for Electron-Beam Lithography (M81/40)
Michael G. Rosenfield

Simulation and Modeling of Evaporated Deposition Profiles (M81/8)
Chiakang Sung

Simulation of Dry Etched Line-Edge Profiles (M81/2)
John L. Reynolds