# A String Model Etching Algorithm

### Robert Jewett

###
EECS Department

University of California, Berkeley

Technical Report No. UCB/ERL M79/68

1979

### http://www.eecs.berkeley.edu/Pubs/TechRpts/1979/ERL-79-68.pdf

The basic algorithm and software implementation of a string model for simulation of surface etching are presented. The algorithm models the time evolution of a line edge profile by advancing nodes or points on a piecewise linear curve representing the profile. The specific formulas for the direction and rate of advance, insertion and deletion of points and deletion of loops are shown. Complete software documentation in the form of parameter definitions and a listing of the FORTRAN code for a CDC 6400 machine are included.

BibTeX citation:

@mastersthesis{Jewett:M79/68, Author = {Jewett, Robert}, Title = {A String Model Etching Algorithm}, School = {EECS Department, University of California, Berkeley}, Year = {1979}, URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1979/9609.html}, Number = {UCB/ERL M79/68}, Abstract = {The basic algorithm and software implementation of a string model for simulation of surface etching are presented. The algorithm models the time evolution of a line edge profile by advancing nodes or points on a piecewise linear curve representing the profile. The specific formulas for the direction and rate of advance, insertion and deletion of points and deletion of loops are shown. Complete software documentation in the form of parameter definitions and a listing of the FORTRAN code for a CDC 6400 machine are included.} }

EndNote citation:

%0 Thesis %A Jewett, Robert %T A String Model Etching Algorithm %I EECS Department, University of California, Berkeley %D 1979 %@ UCB/ERL M79/68 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1979/9609.html %F Jewett:M79/68