Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

A String Model Etching Algorithm

Robert Jewett

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M79/68
1979

http://www.eecs.berkeley.edu/Pubs/TechRpts/1979/ERL-79-68.pdf

The basic algorithm and software implementation of a string model for simulation of surface etching are presented. The algorithm models the time evolution of a line edge profile by advancing nodes or points on a piecewise linear curve representing the profile. The specific formulas for the direction and rate of advance, insertion and deletion of points and deletion of loops are shown. Complete software documentation in the form of parameter definitions and a listing of the FORTRAN code for a CDC 6400 machine are included.


BibTeX citation:

@mastersthesis{Jewett:M79/68,
    Author = {Jewett, Robert},
    Title = {A String Model Etching Algorithm},
    School = {EECS Department, University of California, Berkeley},
    Year = {1979},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1979/9609.html},
    Number = {UCB/ERL M79/68},
    Abstract = {The basic algorithm and software implementation of a string model
for simulation of surface etching are presented.  The algorithm
models the time evolution of a line edge profile by advancing nodes
or points on a piecewise linear curve representing the profile.
The specific formulas for the direction and rate of advance,
insertion and deletion of points and deletion of loops are shown.
Complete software documentation in the form of parameter definitions
and a listing of the FORTRAN code for a CDC 6400 machine are
included.}
}

EndNote citation:

%0 Thesis
%A Jewett, Robert
%T A String Model Etching Algorithm
%I EECS Department, University of California, Berkeley
%D 1979
%@ UCB/ERL M79/68
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1979/9609.html
%F Jewett:M79/68