Sharad Narayan Nandgaonkar
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M79/16
June 1978
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1978/ERL-m-79-16.pdf
In the fabrication of Integrated Circuits a major step is to etch out a particular geometric pattern from a mask onto a semiconductor wafer. This report describes the present state of an user-oriented simulation program (SAMPLE), developed at UCB, to aid in this process as a whole.
The program is based on a model of the process, closely parallelling the real one, as a sequence of operations performed on the photoresist coated wafer by various machines. An user-interface allows the user to interact with these simulated machines and processes using some simple input statements. The overall design and implementation details of the user-interface and the simulated lab are presented, along with the information for using it.
BibTeX citation:
@techreport{Nandgaonkar:M79/16, Author = {Nandgaonkar, Sharad Narayan}, Title = {Report on the Design of a Simulator Program (SAMPLE) for IC Fabrication}, Institution = {EECS Department, University of California, Berkeley}, Year = {1978}, Month = {Jun}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1978/9606.html}, Number = {UCB/ERL M79/16}, Abstract = {In the fabrication of Integrated Circuits a major step is to etch out a particular geometric pattern from a mask onto a semiconductor wafer. This report describes the present state of an user-oriented simulation program (SAMPLE), developed at UCB, to aid in this process as a whole. The program is based on a model of the process, closely parallelling the real one, as a sequence of operations performed on the photoresist coated wafer by various machines. An user-interface allows the user to interact with these simulated machines and processes using some simple input statements. The overall design and implementation details of the user-interface and the simulated lab are presented, along with the information for using it.} }
EndNote citation:
%0 Report %A Nandgaonkar, Sharad Narayan %T Report on the Design of a Simulator Program (SAMPLE) for IC Fabrication %I EECS Department, University of California, Berkeley %D 1978 %@ UCB/ERL M79/16 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1978/9606.html %F Nandgaonkar:M79/16