Patents - Costas J. Spanos

Methods of and apparatuses for measuring electrical parameters of a plasma process
Randall S. Mundt, Paul Douglas MacDonald, Andrew Beers, Mason L. Freed and Costas J. Spanos
U.S. Patent 9,029,728. May 2015

Methods of and apparatuses for maintenance, diagnosis, and optimization of processes
Randall S. Mundt, Paul Douglas MacDonald, Andrew Beers, Mason L. Freed and Costas J. Spanos
U.S. Patent 8,698,037. April 2014

Methods of and apparatuses for measuring electrical parameters of a plasma process
Randall S. Mundt, Paul D. MacDonald, Andrew Beers, Mason L. Freed and Costas J. Spanos
U.S. Patent 7,960,670. June 2011

Methods of and apparatuses for maintenance, diagnosis, and optimization of processes
Paul Douglas MacDonald, Michiel V.P. Kruger, Michael Welch, Mason L. Freed and Costas J. Spanos
U.S. Patent 7,580,767. August 2009

Sensor apparatus power transfer, communication and maintenance methods and apparatus
Mason L. Freed, Randall S. Mundt and Costas J. Spanos
U.S. Patent 7,531,984. May 2009

Methods of and apparatuses for controlling process profiles
Kameshwar Poolla and Costas J. Spanos
U.S. Patent 7,403,834. July 2008

Methods and apparatus for low distortion parameter measurements
Dean Hunt, Costas J. Spanos, Michael Welch, Kameshwar Poolla and Mason L. Freed
U.S. Patent 7,299,148. November 2007

Maintenance unit for a sensor apparatus
Mason L. Freed, Randall S. Mundt and Costas J. Spanos
U.S. Patent 7,282,889. October 2007

Methods of and apparatus for controlling process profiles
Kameshwar Poolla and Costas J. Spanos
U.S. Patent 7,016,754. March 2006

Sensor geometry correction methods and apparatus
Kameshwar Poolla and Costas J. Spanos
U.S. Patent 6,741,945. May 2004

Data collection and corrrection methods and apparatus
Kameshwar Poolla and Costas J. Spanos
U.S. Patent 6,738,722. May 2004

Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control
Mason L. Freed, Randall S. Mundt and Costas J. Spanos
U.S. Patent 6,691,068. February 2004