Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

   

Patents - Kameshwar Poolla

Methods of and apparatuses for controlling process profiles
Kameshwar Poolla and Costas J. Spanos
U.S. Patent 7,403,834. July 2008

Methods and apparatus for low distortion parameter measurements
Dean Hunt, Costas J. Spanos, Michael Welch, Kameshwar Poolla and Mason L. Freed
U.S. Patent 7,299,148. November 2007

Method and apparatus for equipment matching and characterization
Kameshwar Poolla
U.S. Patent 7,212,950. May 2007

Methods of and apparatus for controlling process profiles
Kameshwar Poolla and Costas J. Spanos
U.S. Patent 7,016,754. March 2006

Methods and apparatus for deriving thermal flux data for processing a workpiece
Kameshwar Poolla and Randall S. Mundt
U.S. Patent 6,907,364. June 2005

Sensor geometry correction methods and apparatus
Kameshwar Poolla and Costas J. Spanos
U.S. Patent 6,741,945. May 2004

Data collection and corrrection methods and apparatus
Kameshwar Poolla and Costas J. Spanos
U.S. Patent 6,738,722. May 2004