Patents - Kristofer Pister

Grating fabrication process using combined crystalline-dependent and crystalline-independent etching
Lilac Muller, Kenneth Edmund Arnett, Larry Fabiny and Kristofer Stefan Josef Pister
U.S. Patent 6,517,734. February 2003

Etchants for use in micromachining of CMOS microaccelerometers and microelectromechanical devices and method of making the same
Kristofer S. J. Pister
U.S. Patent 5,726,480. March 1998

CMOS integrated microsensor with a precision measurement circuit
William J. Kaiser, Kristofer S. J. Pister, Oscar M. Stafsudd, Phyllis R. Nelson and Amit Burstein
U.S. Patent 5,659,195. August 1997