Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

   

Patents - Andrew R. Neureuther

Phase-shifting test mask patterns for characterizing illumination polarization balance in image forming optical systems
Gregory R. McIntyre and Andrew R. Neureuther
U.S. Patent 7,224,458. May 2007

Characterizing aberrations in an imaging lens and applications to visual testing and integrated circuit mask analysis
Andrew R. Neureuther, Kostas Adam, Garth C. Robins and E. Frank Gennari
U.S. Patent 7,030,997. April 2006

Method and apparatus for enhancing resist sensitivity and resolution by application of an alternating electric field during post-exposure bake
MoSong Cheng and Andrew R. Neureuther
U.S. Patent 6,686,132. February 2004

Method for making masks
Yong Liu, Avideh Zakhor and Andrew Neureuther
U.S. Patent 5,326,659. July 1994