Patents - James Demmel

Integrated MEMS metrology device using complementary measuring combs
David Garmire, Hyuck Choo, Richard S. Muller, James Demmel and Sanjay Govindjee
U.S. Patent 8,079,246. December 2011

Method for fabricating vertically-offset interdigitated comb actuator device
Hyuck Choo, David Garmire, Richard S. Muller and James Demmel
U.S. Patent 7,573,022. August 2009

MEMS-based, phase-shifting interferometer
Hyuck Choo, Richard S. Muller, David Garmire, James Demmel and Rishi Kant
U.S. Patent 7,564,559. July 2009