Patents - Nathan W. Cheung

Controlled process and resulting device
Francois J. Henley and Nathan W. Cheung
U.S. Patent 7,410,887. August 2008

Controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 7,371,660. May 2008

Method and device for controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 7,348,258. March 2008

Integrated, fluorescence-detecting microanalytical system
J. Alex Chediak, Zhongsheng Luo, Timothy D. Sands, Nathan W. Cheung, Luke P. Lee and Jeonggi Seo
U.S. Patent 7,221,455. May 2007

Controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 7,160,790. January 2007

Gettering technique for wafers made using a controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,890,838. May 2005

Method and device for controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,790,747. September 2004

Controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,632,724. October 2003

Controlled cleaving process using pressurized fluid
Francois J. Henley and Nathan Cheung
U.S. Patent 6,582,999. June 2003

Silicon-on-silicon hybrid wafer assembly
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,558,802. May 2003

Gettering technique for wafers made using a controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,548,382. April 2003

Method for fabricating multi-layered substrates
Nathan W. Cheung, William G. En, Sharon N. Farrens and Mikhail Korolik
U.S. Patent 6,534,381. March 2003

Controlled cleavage process and device for patterned films
Francois J. Henley and Nathan Cheung
U.S. Patent 6,528,391. March 2003

Controlled cleavage process using pressurized fluid
Francois J. Henley and Nathan Cheung
U.S. Patent 6,511,899. January 2003

Method and device for controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,486,041. November 2002

Controlled cleavage process and resulting device using beta annealing
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,458,672. October 2002

Separation of thin films from transparent substrates by selective optical processing
Nathan W. Cheung, Timothy D. Sands and William S. Wong
U.S. Patent 6,420,242. July 2002

Generic layer transfer methodology by controlled cleavage process
Nathan W. Cheung and Francois J. Henley
U.S. Patent 6,391,740. May 2002

Method of separating films from bulk substrates by plasma immersion ion implantation
Nathan W. Cheung, Xiang Lu and Chenming Hu
U.S. Patent 6,344,404. February 2002

Method of forming a low temperature metal bond for use in the transfer of bulk and thin film materials
Nathan W. Cheung, Timothy David Sands and William S. Wong
U.S. Patent 6,335,263. January 2002

Controlled cleavage thin film separation process using a reusable substrate
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,335,264. January 2002

Clustertool system software using plasma immersion ion implantation
Francois J. Henley and Nathan Cheung
U.S. Patent 6,321,134. November 2001

Cleaved silicon thin film with rough surface
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,294,814. September 2001

Controlled cleavage process using patterning
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,290,804. September 2001

Pre-semiconductor process implant and post-process film separation
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,291,326. September 2001

Method and device for controlled cleaving process
Francois J. Henley and Nathan Cheung
U.S. Patent 6,291,313. September 2001

Controlled cleavage process and device for patterned films using a release layer
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,291,314. September 2001

Method and device for controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,284,631. September 2001

Wafer edge engineering method and device
Francois J. Henley, Nathan Cheung, William G. Eng and Igor J. Malik
U.S. Patent 6,265,328. July 2001

Controlled cleavage process and device for patterned films using patterned implants
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,248,649. June 2001

Economical silicon-on-silicon hybrid wafer assembly
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,245,161. June 2001

Cluster tool apparatus using plasma immersion ion implantation
Francois J. Henley and Nathan Cheung
U.S. Patent 6,207,005. March 2001

Device for patterned films
Francois J. Henley and Nathan Cheung
U.S. Patent 6,187,110. February 2001

Pre-semiconductor process implant and post-process film separation
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,184,111. February 2001

Controlled cleavage process and resulting device using beta annealing
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,162,705. December 2000

Silicon-on-silicon wafer bonding process using a thin film blister-separation method
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,159,824. December 2000

Controlled cleavage thin film separation process using a reusable substrate
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,159,825. December 2000

Controlled cleavage system using pressurized fluid
Francois J. Henley and Nathan Cheung
U.S. Patent 6,155,909. December 2000

Cluster tool method using plasma immersion ion implantation
Francois J. Henley and Nathan Cheung
U.S. Patent 6,153,524. November 2000

Pressurized microbubble thin film separation process using a reusable substrate
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,146,979. November 2000

Planarizing technique for multilayered substrates
Francois J. Henley and Nathan Cheung
U.S. Patent 6,103,599. August 2000

Gettering technique for silicon-on-insulator wafers
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,083,324. July 2000

Separation of thin films from transparent substrates by selective optical processing
Nathan W. Cheung, Timothy D. Sands and William S. Wong
U.S. Patent 6,071,795. June 2000

Silicon-on-silicon hybrid wafer assembly
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,048,411. April 2000

Method for controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,033,974. March 2000

Method of separating films from bulk substrates by plasma immersion ion implantation
Nathan W. Cheung, Xiang Lu and Chenming Hu
U.S. Patent 6,027,988. February 2000

Controlled cleaving process
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,013,563. January 2000

Controlled cleavage process using pressurized fluid
Francois J. Henley and Nathan Cheung
U.S. Patent 6,013,567. January 2000

Reusable substrate for thin film separation
Francois J. Henley and Nathan W. Cheung
U.S. Patent 6,010,579. January 2000

Controlled cleavage process using pressurized fluid
Francois J. Henley and Nathan Cheung
U.S. Patent 5,994,207. November 1999

Controlled cleavage process and device for patterned films
Francois J. Henley and Nathan Cheung
U.S. Patent 5,985,742. November 1999