Faculty Publications - Kameshwar Poolla

Articles in journals or magazines

L. Schenato, B. Sinopoli, M. Franceschetti, K. Poolla, and S. S. Sastry, "Foundations of control and estimation over lossy networks," Proc. IEEE, vol. 95, no. 1, pp. 163-187, Jan. 2007.
M. Freed, M. V. P. Kruger, C. J. Spanos, and K. Poolla, "Wafer-grown heat flux sensor arrays for plasma etch processes," IEEE Trans. Semiconductor Manufacturing, vol. 18, no. 1, pp. 148-162, Feb. 2005.
B. Sinopoli, L. Schenato, M. Franceschetti, K. Poolla, M. Jordan, and S. S. Sastry, "Kalman filtering with intermittent observations," IEEE Trans. Automatic Control: Special Issue on Sensor Networks, vol. 49, no. 9, pp. 1453-1464, Sep. 2004.
B. Sinopoli, L. Schenato, M. Franceschetti, K. Poolla, M. Jordan, and S. S. Sastry, "Kalman filtering with intermittent observations," IEEE Trans. Automatic Control, vol. 49, no. 9, pp. 1453-1464, Sep. 2004.
M. Freed, M. Kruger, C. J. Spanos, and K. Poolla, "Autonomous on-wafer sensors for process modeling, diagnosis, and control," IEEE Trans. Semiconductor Manufacturing, vol. 14, no. 3, pp. 255-264, Aug. 2001.
K. Poolla and A. Tikku, "Robust performance against slowly-varying structured perturbations," IEEE Trans. Automatic Control, vol. 40, no. 9, pp. 1589-1602, Sep. 1995.
K. Poolla, P. Khargonekar, A. Tikku, J. Krause, and K. Nagpal, "A time-domain approach to model validation," IEEE Trans. Automatic Control, vol. 39, no. 5, pp. 951-959, May 1994.

Q. Zhang, P. Friedberg, K. Poolla, and C. J. Spanos, "Enhanced spatial PEB uniformity through a novel bake plate design," in Proc. AEC/APC XVII Symp. 2005, Austin, TX: AEC/APC Official Proceedings CD-ROM, 2005, pp. 1-5.

B. Sinopoli, L. Schenato, M. Franceschetti, K. Poolla, M. Jordan, and S. S. Sastry, "Kalman Filtering with Intermittent Observations," EECS Department, University of California, Berkeley, Tech. Rep. UCB/ERL M03/15, 2003.

K. Poolla and C. J. Spanos, "Methods of and apparatus for controlling process profiles," U.S. Patent 7,016,754. March 2006.
K. Poolla and C. J. Spanos, "Methods of and apparatuses for controlling process profiles," U.S. Patent Application. Sep. 2005.
D. Hunt, C. J. Spanos, M. Welch, K. Poolla, and M. L. Freed, "Methods and apparatus for low distortion parameter measurements," U.S. Patent Application. July 2005.
K. Poolla and R. S. Mundt, "Methods and apparatus for deriving thermal flux data for processing a workpiece," U.S. Patent 6,907,364. June 2005.
K. Poolla and C. J. Spanos, "Sensor methods and apparatus," U.S. Patent Application. May 2004.
K. Poolla and C. J. Spanos, "Sensor geometry correction methods and apparatus," U.S. Patent 6,741,945. May 2004.
K. Poolla and C. J. Spanos, "Data collection and corrrection methods and apparatus," U.S. Patent 6,738,722. May 2004.
K. Poolla, "Methods and apparatus for equipment matching and characterization," U.S. Patent Application. Sep. 2003.