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Articles in journals or magazines
- L. Schenato, B. Sinopoli, M. Franceschetti, K. Poolla, and S. S. Sastry, "Foundations of control and estimation over lossy networks," Proc. IEEE, vol. 95, no. 1, pp. 163-187, Jan. 2007.
- M. Freed, M. V. P. Kruger, C. J. Spanos, and K. Poolla, "Wafer-grown heat flux sensor arrays for plasma etch processes," IEEE Trans. Semiconductor Manufacturing, vol. 18, no. 1, pp. 148-162, Feb. 2005.
- B. Sinopoli, L. Schenato, M. Franceschetti, K. Poolla, M. Jordan, and S. S. Sastry, "Kalman filtering with intermittent observations," IEEE Trans. Automatic Control: Special Issue on Sensor Networks, vol. 49, no. 9, pp. 1453-1464, Sep. 2004.
- B. Sinopoli, L. Schenato, M. Franceschetti, K. Poolla, M. Jordan, and S. S. Sastry, "Kalman filtering with intermittent observations," IEEE Trans. Automatic Control, vol. 49, no. 9, pp. 1453-1464, Sep. 2004.
- M. Freed, M. Kruger, C. J. Spanos, and K. Poolla, "Autonomous on-wafer sensors for process modeling, diagnosis, and control," IEEE Trans. Semiconductor Manufacturing, vol. 14, no. 3, pp. 255-264, Aug. 2001.
- K. Poolla and A. Tikku, "Robust performance against slowly-varying structured perturbations," IEEE Trans. Automatic Control, vol. 40, no. 9, pp. 1589-1602, Sep. 1995.
- K. Poolla, P. Khargonekar, A. Tikku, J. Krause, and K. Nagpal, "A time-domain approach to model validation," IEEE Trans. Automatic Control, vol. 39, no. 5, pp. 951-959, May 1994.
Articles in conference proceedings
Technical Reports
- B. Sinopoli, L. Schenato, M. Franceschetti, K. Poolla, M. Jordan, and S. S. Sastry, "Kalman Filtering with Intermittent Observations," EECS Department, University of California, Berkeley, Tech. Rep. UCB/ERL M03/15, 2003.
Patents
- K. Poolla and C. J. Spanos, "Methods of and apparatus for controlling process profiles," U.S. Patent 7,016,754. March 2006.
- K. Poolla and C. J. Spanos, "Methods of and apparatuses for controlling process profiles," U.S. Patent Application. Sep. 2005.
- D. Hunt, C. J. Spanos, M. Welch, K. Poolla, and M. L. Freed, "Methods and apparatus for low distortion parameter measurements," U.S. Patent Application. July 2005.
- K. Poolla and R. S. Mundt, "Methods and apparatus for deriving thermal flux data for processing a workpiece," U.S. Patent 6,907,364. June 2005.
- K. Poolla and C. J. Spanos, "Sensor methods and apparatus," U.S. Patent Application. May 2004.
- K. Poolla and C. J. Spanos, "Sensor geometry correction methods and apparatus," U.S. Patent 6,741,945. May 2004.
- K. Poolla and C. J. Spanos, "Data collection and corrrection methods and apparatus," U.S. Patent 6,738,722. May 2004.
- K. Poolla, "Methods and apparatus for equipment matching and characterization," U.S. Patent Application. Sep. 2003.
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