Faculty Publications - Albert Pisano

Articles in journals or magazines

• C. Lin, Y. Chen, V. Felmetsger, D. Senesky, and A. Pisano, "AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators," Adv. Mater., vol. 24, no. 20, pp. 2722-2727, May 2012.
• C. Lin, Y. Lai, J. Hsu, Y. Chen, D. Senesky, and A. Pisano, "High-Q aluminum nitride Lamb wave resonators with biconvex edges," Appl. Phys. Lett., vol. 99, no. 14, pp. 143501, Oct. 2011.
• C. Lin, Y. Chen, and A. Pisano, "Theoretical investigation of Lamb wave characteristics in AlN/3C-SiC composite membranes," Appl. Phys. Lett., vol. 97, no. 19, pp. 193506, Nov. 2010.
• C. Lin, W. Lien, V. Felmetsger, M. Hopcroft, D. Senesky, and A. Pisano, "AlN thin films grown on epitaxial 3C-SiC (100) for piezoelectric resonant devices," Appl. Phys. Lett., vol. 97, no. 14, pp. 141907, Oct. 2010.
• C. Lin, T. Yen, V. Felmetsger, M. Hopcroft, J. Kuypers, and A. Pisano, "Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications," Appl. Phys. Lett., vol. 98, no. 8, pp. 083501, Aug. 2010.
• C. Lin, T. Yen, Y. Lai, V. Felmetsger, M. Hopcroft, J. Kuypers, and A. Pisano, "Temperature-compensated aluminum nitride Lamb wave resonators," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 57, no. 3, pp. 524-532, March 2010.
• J. C. Cheng and A. Pisano, "Photolithographic process for integration of the biopolymer chitosan into micro/nanostructures," J. Microelectromechanical Systems, vol. 17, no. 2, pp. 402-409, April 2008.
• W. C. Lee, Y. H. Cho, and A. Pisano, "Nanomechanical protein concentration detector using a nanogap squeezing actuator with compensated displacement monitoring electrodes," J. Microelectromechanical Systems, vol. 16, no. 4, pp. 802-808, Aug. 2007.
• G. Piazza, P. J. Stephanou, and A. Pisano, "Single-chip multiple-frequency ALN MEMS filters based on contour-mode piezoelectric resonators," J. Microelectromechanical Systems, vol. 16, no. 2, pp. 319-328, April 2007.
• R. G. Azevedo, D. G. Jones, A. V. Jog, B. Jamshidi, D. R. Meyers, L. Chen, X. Fu, M. Mehregany, M. B. J. Wijesundara, and A. Pisano, "A SiC MEMS resonant strain sensor for harsh environment applications," IEEE J. Sensors, vol. 7, no. 4, pp. 568-576, April 2007.
• I. Park, Z. Li, X. Li, A. Pisano, and R. S. Williams, "Towards the silicon nanowire-based sensor for intracellular biochemical detection," Biosensors and Bioelectronics, vol. 22, no. 9-10, pp. 2065-2070, April 2007.
• M. C. Y. Huang, K. B. Cheng, Y. Zhou, A. Pisano, and C. Chang-Hasnain, "Monolithic integrated piezoelectric MEMS-tunable VCSEL," IEEE J. Selected Topics in Quantum Electronics, vol. 13, no. 2, pp. 374-380, March 2007.
• J. M. Lippmann, E. J. Geiger, and A. Pisano, "Polymer invest molding: Method for fabricating hollow, microscale parts," Sensors and Actuators A: Physical, vol. 134, no. 1, pp. 2-10, Feb. 2007. [abstract]
• D. A. Mair, E. Geiger, A. Pisano, J. M. J. Frechet, and F. Svec, "Injection molded microfluidic chips featuring integrated interconnects," Lab on a Chip, vol. 6, no. 10, pp. 1346-1354, Oct. 2006.
• P. J. Stephanou, G. Piazza, C. D. White, M. B. J. Wijesundara, and A. Pisano, "Design of novel mechanical coupling for contour mode piezoelectric RF MEMS filters," J. Physics: Conference Series, vol. 34, pp. 342-349, May 2006.
• G. Piazza, K. Castelino, A. Pisano, and C. Chang-Hasnain, "Design of a monolithic piezoelectrically actuated microelectromechanical tunable vertical-cavity surface-emitting laser," Optics Letters, vol. 30, no. 8, pp. 896-898, April 2005.
• J. D. Zahn, A. Deshmukh, A. Pisano, and D. Liepmann, "Continuous on-chip micropumping for microneedle enhanced drug delivery," Biomedical Microdevices, vol. 6, no. 3, pp. 183-190, Sep. 2004.
• A. C. Fernandez-Pello, A. Pisano, K. Fu, D. C. Walther, A. Knobloch, F. Martinez, M. Senesky, C. Stoldt, R. Maboudian, S. R. Sanders, and D. Liepmann, "MEMS rotary engine power system," Trans. IEE Japan, vol. 123-E, no. 9, pp. 326-330, Sep. 2003.
• L. Lin and A. Pisano, "Silicon-processed microneedles," J. Microelectromechanical Systems, vol. 8, no. 1, pp. 78-84, March 1999.
• L. Lin, R. T. Howe, and A. Pisano, "Microelectromechanical filters for signal processing," J. Microelectromechanical Systems, vol. 7, no. 3, pp. 286-294, Sep. 1998.
• D. L. DeVoe and A. Pisano, "Modeling and optimal design of piezoelectric cantilever microactuators," J. Microelectromechanical Systems, vol. 6, no. 3, pp. 266-270, Sep. 1997.
• M. J. Daneman, N. Tien, O. Solgaard, A. Pisano, K. Y. Lau, and R. S. Muller, "Linear microvibromotor for positioning optical components," J. Microelectromechanical Systems, vol. 5, no. 3, pp. 159-165, Sep. 1996.
• Y. Cho, A. Pisano, and R. T. Howe, "Viscous damping model for laterally oscillating microstructures," J. Microelectromechanical Systems, vol. 3, no. 2, pp. 81-87, June 1994.

Articles in conference proceedings

• J. H. Kuypers, C. M. Lin, G. Vigevani, and A. Pisano, "Intrinsic temperature compensation of aluminum nitride Lamb wave resonators for multiple-frequency references," in Proc. 2008 IEEE Intl. Frequency Control Symp. (FCS '08), D. Coler, Ed., Piscataway, NJ: IEEE Press, 2008, pp. 240-249.
• B. Jamshidi, R. G. Azevedo, M. B. J. Wijesundara, and A. Pisano, "Corrosion enhanced capacitive strain gauge at 370 degrees C," in Proc. 6th IEEE Sensors Conf. (SENSORS 2007), Piscataway, NJ: IEEE Press, 2007, pp. 804-807.
• J. C. Cheng, T. H. Cauley III, and A. Pisano, "Lithographic patterning of immobilized enzymes in chitosan thin films for multi-layer, chemical/biological sensors," in Proc. 7th IEEE Conf. on Nanotechnology (IEEE-NANO 2007), Piscataway, NJ: IEEE Press, 2007, pp. 334-337.
• R. G. Azevedo, J. Zhang, D. G. Jones, D. R. Myers, A. V. Jog, B. Jamshidi, M. B. J. Wijesundara, R. Maboudian, and A. Pisano, "Silicon carbide coated MEMS strain sensor for harsh environment applications," in Technical Digest of the 20th IEEE Intl. Conf. on Micro Electro Mechanical Systems (MEMS 2007), Piscataway, NJ: IEEE Press, 2007, pp. 643-646.
• P. J. Stephanou and A. Pisano, "GHz higher order contour mode ALN annular resonators," in Technical Digest of the 20th IEEE Intl. Conf. on Micro Electro Mechanical Systems (MEMS 2007), Piscataway, NJ: IEEE Press, 2007, pp. 787-790.
• D. G. Jones, R. G. Azevedo, M. W. Chan, A. Pisano, and M. B. J. Wijesundara, "Low temperature ion beam sputter deposition of amorphous silicon carbide for wafer-level vacuum sealing," in Technical Digest of the 20th IEEE Intl. Conf. on Micro Electro Mechanical Systems (MEMS 2007), Piscataway, NJ: IEEE Press, 2007, pp. 275-278.
• I. Park, Z. Li, and A. Pisano, "Selective functionalization of silicon micro/nanowire sensors via localized Joule heating," in Proc. 2nd IEEE Intl. Conf. on Nano/Micro Engineered and Molecular Systems (NEMS 2007), Piscataway, NJ: IEEE Press, 2007, pp. 899-904.
• K. E. Wojciechowski, B. Boser, and A. Pisano, "A MEMS resonant strain sensor with 33 nano-strain resolution in a 10 kHz bandwidth," in Proc. 4th IEEE Sensors 2005 Conf., Piscataway, NJ: IEEE Press, 2005, pp. 947-950.
• S. Payen, D. C. Walther, and A. Pisano, "A MEMS RF-interrogated biosensor," in Proc. 2005 3rd Annual Intl. IEEE/EMBS Special Topic Conf. on Microtechnologies in Medicine and Biology, Piscataway, NJ: IEEE Press, 2005, pp. 76-79.
• T. A. Roessig, R. T. Howe, A. Pisano, and J. H. Smith, "Surface-micromachined resonant accelerometer," in 1997 Intl. Conf. on Solid-State Sensors and Actuators (Transducers '97). Digest of Technical Papers, Vol. 2, Piscataway, NJ: IEEE Press, 1997, pp. 859-862.
• J. Evans, D. Liepmann, and A. Pisano, "Planar laminar mixer [MEMS fluid processing system]," in Proc. 10th Annual Intl. Workshop on Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, New York, NY: IEEE Press, 1997, pp. 96-101.
• L. A. Field, R. M. White, and A. Pisano, "Fluid-powered rotary gears and micro-flow channels," in TRANSDUCERS '91 Digest of Technical Papers: 1991 Intl. Conf. on Solid-State Sensors and Actuators, New York, NY: IEEE, 1991, pp. 1033-1036. [abstract]
• C. Kim, A. Pisano, R. S. Muller, and M. G. Lim, "Polysilicon microgripper," in 1990 IEEE Solid-State Sensor and Actuator Workshop. Technical Digest., New York, NY: IEEE Press, 1990, pp. 48-51.

Patents

• G. Piazza, P. J. Stephanou, and A. P. Pisano, "Contour-mode piezoelectric micromechanical resonators," U.S. Patent Application. May 2006.
• B. L. Bircumshaw, O. M. O'Reilly, and A. P. Pisano, "MEMS resonator and method of making same," U.S. Patent 6,940,370. Sep. 2005.
• G. Piazza, P. J. Stephanou, and A. P. Pisano, "Contour-mode piezoelectric micromechanical resonators," U.S. Patent Application. June 2005.
• B. L. Bircumshaw, A. P. Pisano, and O. M. O'Reilly, "Radial bulk annular resonator using MEMS technology," U.S. Patent 6,894,586. May 2005.
• S. Zimmermann, B. Stoeber, D. Liepmann, and A. Pisano, "Method for forming hollow out-of-plane microneedles and devices formed thereby," U.S. Patent Application. April 2005.
• K. P. Seward and A. P. Pisano, "Method of interventional surgery," U.S. Patent 6,860,867. March 2005.
• M. B. J. Wijesundara, G. Valente, R. T. Howe, A. P. Pisano, C. Carraro, and R. Maboudian, "Manufacturable low-temperature silicon carbide deposition technology," U.S. Patent Application. July 2004.
• S. Zimmermann, B. Stoeber, D. Liepmann, and A. Pisano, "Monitoring method and/or apparatus," U.S. Patent Application. April 2004.
• K. P. Seward and A. P. Pisano, "Microfabricated surgical device for interventional procedures," U.S. Patent Application. March 2004.
• K. P. Seward and A. P. Pisano, "Method of interventional surgery," U.S. Patent Application. March 2004.
• M. Migliuolo, W. D. Suh, A. P. Pisano, D. Liepmann, K. Lebouitz, J. Rogers, and M. Schlesinger, "Medical and surgical devices with an integrated sensor," U.S. Patent Application. Jan. 2004.
• K. S. Lebouitz and A. P. Pisano, "Method of fabricating epidermal abrasion device," U.S. Patent 6,610,235. Aug. 2003.
• K. P. Seward and A. P. Pisano, "Microfabricated surgical device for interventional procedures," U.S. Patent 6,547,803. April 2003.
• K. S. Lebouitz, R. T. Howe, and A. P. Pisano, "Microfabricated filter and shell constructed with a permeable membrane," U.S. Patent 6,478,974. Nov. 2002.
• P. A. Stupar and A. P. Pisano, "Microfabricated surgical devices and methods for making the same," U.S. Patent Application. June 2002.
• N. H. Talbot, C. G. Keller, and A. P. Pisano, "Apparatus for fabricating needles via conformal deposition in two-piece molds," U.S. Patent 6,375,148. April 2002.
• K. P. Seward, A. P. Pisano, and P. A. Stupar, "Microfabricated surgical device," U.S. Patent Application. June 2001.
• K. S. Lebouitz and A. P. Pisano, "Epidermal abrasion device with isotropically etched tips, and method of fabricating such a device," U.S. Patent 6,187,210. Feb. 2001.
• N. H. Talbot, C. G. Keller, and A. P. Pisano, "Method for fabricating needles via conformal deposition in two-piece molds," U.S. Patent 6,106,751. Aug. 2000.
• J. Evans, D. Liepmann, and A. P. Pisano, "Apparatus and method for planar laminar mixing," U.S. Patent 6,065,864. May 2000.
• T. Roessig, R. T. Howe, and A. P. Pisano, "Resonant accelerometer with flexural lever leverage system," U.S. Patent 5,969,249. Oct. 1999.
• A. P. Pisano and K. S. Lebouitz, "Microneedle with isotropically etched tip, and method of fabricating such a device," U.S. Patent 5,928,207. July 1999.
• K. S. Lebouitz, R. T. Howe, and A. P. Pisano, "Microfabricated filter and shell constructed with a permeable membrane," U.S. Patent 5,919,364. July 1999.
• L. Lin and A. Pisano, "IC-processed microneedles," U.S. Patent 5,855,801. Jan. 1999. [abstract]
• S. S. Lee, R. M. White, and A. P. Pisano, "Cantilever pressure transducer," U.S. Patent 5,633,552. May 1997.
• L. Lin and A. P. Pisano, "IC-processed microneedles," U.S. Patent 5,591,139. Jan. 1997.
• L. Lin, C. T. Nguyen, R. T. Howe, and A. P. Pisano, "Microelectromechanical signal processor fabrication," U.S. Patent 5,589,082. Dec. 1996.
• L. Lin, C. T. Nguyen, R. T. Howe, and A. Pisano, "Microelectromechanical signal processors," U.S. Patent 5,455,547. Oct. 1995. [abstract]
• A. P. Pisano, "Constant velocity optical scanning system," U.S. Patent 4,901,105. Feb. 1990.

Talks or presentations

• A. Pisano, "MEMS and Nano Technology for the Handheld, Portable Electronic and the Automotive Markets (Plenary Talk)," presented at 14th International Conference on Solid-State Sensors, Actuators and Microsystems (TRASDUCERS 2007), Lyon, France, June 2007.
• A. Pisano, "Micro- and Nano-Technologies for Automotive Research (Plenary Lecture)," presented at 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2007), Bangkok, Thailand, Jan. 2007.