Faculty Publications - Richard S. Muller

Books

• R. S. Muller, T. I. Kamins, and M. Chan, Device Electronics for Integrated Circuits, 3rd ed., New York, NY: John Wiley and Sons, Inc., 2003. [abstract]
• R. S. Muller, R. T. Howe, S. D. Senturia, R. L. Smith, and R. M. White, Eds., Microsensors, New York: IEEE Press, 1991. [abstract]
• R. S. Muller and T. I. Kamins, Device Electronics for Integrated Circuits, 2nd ed., New York: Wiley, 1986. [abstract]
• R. S. Muller and T. I. Kamins, Device Electronics for Integrated Circuits, New York: Wiley, 1977. [abstract]

Book chapters or sections

• R. S. Muller, "Microsystem technologies, MEMS and NEMS (in Chinese)," in Microsystem and Technology, Z. Zhou, Ed., Beijing, China: China Science Press, 2007, pp. 787-790.
• B. C. Y. Lin, T. King Liu, and R. S. Muller, "Poly-SiGe MEMS actuators for adaptive optics," in MEMS/MOEMS Components and Their Applications IIII, S. S. Olivier, S. A. Tadigadapa, and A. K. Henning, Eds., Proceedings of SPIE, Vol. 6113, Bellingham, WA: SPIE -- Society of Photo-Optical Instrumentation Engineers, 2006, pp. 61130S-1-7.

Articles in journals or magazines

• R. Kant, D. Garmire, H. Coo, and R. S. Muller, "Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer," Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on, pp. 57-58, Aug. 2007.
• H. Choo and R. S. Muller, "Devices, structures, and processes for optical MEMS (Invited Review)," IEEJ Trans. Electrical and Electronic Engineering, vol. 2, no. 3, pp. 216-231, May 2007.
• H. Choo, D. Garmire, J. Demmel, and R. S. Muller, "Simple fabrication process for self-aligned, high-performance microscanners--Demonstrated use to generate a 2-D ablation pattern," J. Microelectromechanical Systems, vol. 16, no. 2, pp. 260-268, April 2007.
• H. Choo and R. S. Muller, "Addressable microlens array to improve dynamic range of Shack-Hartmann sensors," J. Microelectromechanical Systems, vol. 15, no. 6, pp. 1555-1567, Dec. 2006.
• J. Kim, H. Choo, L. Lin, and R. S. Muller, "Microfabricated torsional actuators using self-aligned plastic deformation of silicon," J. Microelectromechanical Systems, vol. 15, no. 3, pp. 553-562, June 2006.
• P. S. Riehl, K. L. Scott, R. S. Muller, R. T. Howe, and J. A. Yasaitis, "Electrostatic charge and field sensors based on micromechanical resonators," IEEE/ASME J. Microelectromechanical Systems, vol. 12, no. 5, pp. 577-589, Oct. 2003.
• U. Srinivasan, M. A. Helmbrecht, R. S. Muller, and R. T. Howe, "MEMS: Some self-assembly required," Optics & Photonics News, vol. 13, no. 11, pp. 20-56, Nov. 2002.
• C. Rembe, P. Caton, R. M. White, and R. S. Muller, "Stroboscopic interferometry for characterization and improvement of flexural plate-wave transducers," Proc. SPIE - The Intl. Society for Optical Engineering, vol. 4558, pp. 108-116, Oct. 2001.
• J. M. Bustillo, R. T. Howe, and R. S. Muller, "Surface micromachining for microelectromechanical systems," Proc. IEEE, vol. 86, no. 8, pp. 1552-1574, Aug. 1998.
• M. Kiang, O. Solgaard, K. Y. Lau, and R. S. Muller, "Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning," J. Microelectromechanical Systems, vol. 7, no. 1, pp. 27-37, March 1998.
• J. W. Judy and R. S. Muller, "Magnetically actuated, addressable microstructures," J. Microelectromechanical Systems, vol. 6, no. 3, pp. 249-256, Sep. 1997.
• M. J. Daneman, N. Tien, O. Solgaard, A. Pisano, K. Y. Lau, and R. S. Muller, "Linear microvibromotor for positioning optical components," J. Microelectromechanical Systems, vol. 5, no. 3, pp. 159-165, Sep. 1996.
• Z. Calahorra, E. Minami, R. M. White, and R. S. Muller, "Reactive ion etching of indium-tin-oxide films," J. Electrochemical Society, vol. 136, no. 6, pp. 1839-1840, June 1989.
• L. Fan, Y. Tai, and R. S. Muller, "Integrated movable micromechanical structures for sensors and actuators," IEEE Trans. Electron Devices, vol. 35, no. 6, pp. 724-730, June 1988.
• D. L. Polla, R. S. Muller, and R. M. White, "Integrated multisensor chip," IEEE Electron Device Letters, vol. 7, no. 4, pp. 254-256, April 1986.
• P. Chen, R. S. Muller, R. D. Jolly, G. L. Halac, R. M. White, A. P. Andrews, T. C. Lim, and M. E. Motamedi, "Integrated silicon microbeam PI-FET accelerometer," IEEE Trans. Electron Devices, vol. 29, no. 1, pp. 27-33, Jan. 1982.
• S. Kwan, C. T. Chuang, R. S. Muller, and R. M. White, "Dual-gate depletion-mode DMOS transistor for linear gain-control application," IEEE Trans. Electron Devices, vol. 26, no. 7, pp. 1053-1058, July 1979.
• S. H. Kwan, R. S. Muller, and R. M. White, "High frequency strain transducer for acoustic wave signal processing," IEEE Trans. Electron Devices, vol. 24, no. 9, pp. 1191, Sep. 1977.

Articles in conference proceedings

• J. M. Rabaey, J. M. Carmena, B. Knight, D. Chen, M. Mark, R. S. Muller, S. Gambini, and S. Venkatraman, "Microscopic Wireless to Power Brain-Machine Interfaces (Keynote Address)," in Proc. CMOS Emerging Technologies Workshop, 2008.
• D. Garmire, H. Choo, R. Kant, S. govindjee, C. H. Séquin, R. S. Muller, and J. Demmel, "Diamagnetically levitated MEMS accelerometers (Poster Paper)," in 14th IEEE Intl. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2007) Digest of Technical Papers, Piscataway, NJ: IEEE Press, 2007, pp. 1203-1206.
• R. S. Muller, "Plenty of Opportunity As Well As 'Room at the Bottom' -- Some Examples in Optical MEMS (Keynote Address)," in Proc. 4th Intl. Conf. on Networked Sensing Systems (INSS 2007), Piscataway, NJ: IEEE Press, 2007, pp. 1-1.
• H. Choo, D. Garmire, J. Demmel, and R. S. Muller, "A simple process to fabricate self-aligned, high-performance torsional microscanners; demonstrated use in a two-dimensional scanner," in IEEE/LEOS Optical MEMs 2005: Intl. Conf. on Optical MEMs and Their Applications, Piscataway, NJ: IEEE Press, 2005, pp. 21-22.
• D. Garmire, R. S. Muller, and J. Demmel, "Vision-based teleoperation of a Stroboscopic Microscopic Interferometric System for remote dynamic MEMS testing," in IEEE/LEOS Optical MEMs 2005: Intl. Conf. on Optical MEMs and Their Applications, Piscataway, NJ: IEEE Press, 2005, pp. 163-164.
• H. Choo and R. S. Muller, "Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology," in Proc. 2003 IEEE/LEOS Intl. Conf. on Optical MEMS, Piscataway, NJ: IEEE Press, 2003, pp. 169-170.
• K. Gupta, H. Choo, H. Kim, and R. S. Muller, "Micromachined polarization beam splitters for the visible spectrum," in Proc. 2003 IEEE/LEOS Intl. Conf. on Optical MEMS, Piscataway, NJ: IEEE Press, 2003, pp. 171-172.
• P. A. Krulevitch, P. A. Bierden, T. Bifano, E. Carr, C. E. Dimas, H. Dyson, M. A. Helmbrecht, P. Kurczynski, R. S. Muller, S. S. Olivier, Y. Peter, B. Sadoulet, O. Solgaard, and E. Yang, "MOEMS spatial light modulator development at the center for adaptive optics," in Proc. SPIE: MOEMS and Miniaturized Systems III, J. H. Smith, Ed., Vol. 4983, Bellingham, WA: SPIE, 2003, pp. 227-234.
• C. Rembe, R. Kant, M. P. Young, and R. S. Muller, "Network-connected MEMS measuring system for high-speed data transfer to CAD and simulation tools," in Proc. SPIE: 5th Intl. Conf. on Vibration Measurements by Laser Techniques -- Advances and Applications, E. P. Tomasini, Ed., Vol. 4827, Bellingham, WA: SPIE, 2002, pp. 94-102.
• C. W. Chang, T. Budde, H. H. Gatzen, and R. S. Muller, "A magnetically actuated scanner for intravascular ultrasound imaging," in 2001 ASME Intl. Mechanical Engineering Congress and Exposition Technical Digest: Micro-Electro-Mechanical Systems (MEMS), New York, NY: ASME, 2001, pp. 799-804.
• R. A. Conant, J. T. Nee, K. Y. Lau, and R. S. Muller, "A flat high-frequency scanning micromirror," in Solid-State Sensor and Actuator Workshop Technical Digest, Cleveland, OH: TRF Press, 2000, pp. 6-9.
• C. Kim, A. Pisano, R. S. Muller, and M. G. Lim, "Polysilicon microgripper," in 1990 IEEE Solid-State Sensor and Actuator Workshop. Technical Digest., New York, NY: IEEE Press, 1990, pp. 48-51.
• D. L. Polla, W. T. Chang, R. S. Muller, and R. M. White, "Integrated zinc oxide-on-silicon tactile-sensor array," in Technical Digest of the 1985 IEEE International Electron Devices Meeting, Vol. 31, New York, NY: IEEE Press, 1985, pp. 133-136.
• D. L. Polla, R. S. Muller, and R. M. White, "Pyroelectric properties and applications of sputtered zinc-oxide thin films," in Proc. 1985 IEEE Ultrasonics Symp., B. R. McAvoy, Ed., New York, NY: IEEE Press, 1985, pp. 495-498.
• K. Uozumi, R. M. White, and R. S. Muller, "IDT-generated ultrasonic Lamb waves in a very thin membrane," in Proc. 1985 IEEE Ultrasonics Symp., B. R. McAvoy, Ed., New York, NY: IEEE Press, 1985, pp. 212-215.
• D. L. Polla, R. M. White, and R. S. Muller, "Integrated chemical-reaction sensor," in IEEE 1985 Intl. Conf. on Solid-State Sensors and Actuators Digest of Technical Papers (TRANSDUCERS '85 ), New York, NY: IEEE Press, 1985, pp. 33-36. [abstract]
• L. S. Fan, R. M. White, and R. S. Muller, "A mutual capacitive normal- and shear-sensitive tactile sensor," in Technical Digest of the 1984 IEEE Intl. Electron Devices Meeting, Vol. 30, New York, NY: IEEE Press, 1984, pp. 220-222.
• D. L. Polla, R. S. Muller, and R. M. White, "Fully-integrated ZnO on silicon pyroelectric infrared detector array," in Technical Digest of the 1984 IEEE Intl. Electron Devices Meeting, Vol. 30, New York, NY: IEEE Press, 1984, pp. 382-384.
• D. L. Polla, R. S. Muller, and R. M. White, "Monolithic integrated zinc-oxide on silicon pyroelectric anemometer," in Technical Digest of the 1983 IEEE Intl. Electron Devices Meeting, Vol. 29, New York, NY: IEEE Press, 1983, pp. 639-642.
• P. Chen, R. Jolly, G. Halac, R. S. Muller, R. M. White, A. P. Andrews, and M. E. Motamedi, "A planar-processed PI-FET accelerometer," in 1980 IEEE Intl. Electron Devices Meeting Technical Digest, New York, NY: IEEE Press, 1980, pp. 848-849.
• P. L. Chen, R. S. Muller, R. M. White, and R. Jolly, "Thin film ZnO-MOS transducer with virtually DC response," in Proc. 1980 IEEE Ultrasonics Symp., B. R. McAvoy, Ed., New York, NY: IEEE Press, 1980, pp. 945-948.
• C. T. Chuang, R. M. White, A. Lee, P. Chen, R. S. Muller, and T. Shiosaki, "Ultrasonic receiving array having power response," in Proc. 1979 IEEE Ultrasonics Symp., J. de Klerk and B. R. McAvoy, Eds., New York, NY: IEEE Press, 1979, pp. 114-118.
• C. T. Chuang, R. M. White, T. Shiosaki, R. S. Muller, and S. H. Kwan, "Thin zinc-oxide film array for programmable filter and scanned receiving transducer," in Proc. 1979 IEEE Ultrasonics Symp., J. de Klerk and B. R. McAvoy, Eds., New York, NY: IEEE Press, 1979, pp. 915-920.
• S. Kwan, R. M. White, and R. S. Muller, "Integrated ultrasonic transducer," in Proc. 1977 IEEE Ultrasonics Symp., New York, NY: IEEE Press, 1978, pp. 843-847.

Technical Reports

• M. Hart, R. Conant, K. Y. Lau, and R. S. Muller, "Stroboscopic Interferometer System for Dynamic MEMS Characterization," EECS Department, University of California, Berkeley, Tech. Rep. UCB/ERL M00/18, 2000.
• K. Williams and R. S. Muller, "Etching for Micromachining Processing," EECS Department, University of California, Berkeley, Tech. Rep. UCB/ERL M96/37, 1996.

Patents

• H. Choo and R. S. Muller, "Optical system applicable to improving the dynamic range of Shack-Hartmann sensors," U.S. Patent 7,355,793. April 2008. [abstract]
• B. Behin, K. Y. Lau, and R. S. Muller, "Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam," U.S. Patent Application. Nov. 2007. [abstract]
• H. Choo, D. Garmire, R. S. Muller, and J. Demmel, "CMOS-compatible high-performance microscanners, including structures, high-yield simplified fabrication methods, and applications," U.S. Patent Application. Feb. 2007. [abstract]
• H. Choo and R. S. Muller, "Optical switch using frequency-based addressing in a microelectromechanical systems array," U.S. Patent Application. Nov. 2006. [abstract]
• R. A. Conant, J. T. Nee, K. Lau, and R. S. Muller, "Staggered torsional electrostatic combdrive and method of forming same," U.S. Patent 7,079,299. July 2006.
• H. Choo, R. S. Muller, D. Garmire, J. Demmel, and R. Kant, "MEMS-based, phase-shifting interferometer," U.S. Patent Application. June 2006. [abstract]
• B. Behin, K. Y. Lau, and R. S. Muller, "Global mechanical stop," U.S. Patent 6,962,830. Nov. 2005.
• B. Behin, K. Y. Lau, and R. S. Muller, "Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam," U.S. Patent 6,897,539. May 2005.
• R. A. Conant, J. T. Nee, K. Lau, and R. S. Muller, "Staggered torsional electrostatic combdrive and method of forming same," U.S. Patent 6,758,983. July 2004.
• J. W. Judy and R. S. Muller, "Magnetic microactuator," U.S. Patent 5,945,898. Aug. 1999.
• M. Kiang, K. Y. Lau, R. S. Muller, and O. Solgaard, "Apparatus and method for optical scanning with an oscillatory microelectromechanical system," U.S. Patent 5,867,297. Feb. 1999.
• R. S. Muller, C. H. Mastrangelo, and K. R. Williams, "Sealed micromachined vacuum and gas filled devices," U.S. Patent 5,493,177. Feb. 1996.
• R. S. Muller and C. H. Mastrangelo, "Vacuum-sealed silicon incandescent light," U.S. Patent 5,285,131. Feb. 1994.
• R. S. Muller, L. Fan, and Y. C. Tai, "Micro motors and method for their fabrication," U.S. Patent 5,252,881. Oct. 1993.
• R. S. Muller and J. I. Goicolea, "Null-detection magnetometers," U.S. Patent 4,849,695. July 1989.
• R. S. Muller and E. S. Kim, "IC processed piezoelectric microphone," U.S. Patent 4,816,125. March 1989.
• R. S. Muller and J. I. Goicolea, "Integrated-circuit one-way isolation coupler incorporating one or several carrier-domain magnetometers," U.S. Patent 4,801,883. Jan. 1989.
• R. S. Muller and E. S. Kim, "IC processed piezoelectric microphone," U.S. Patent 4,783,821. Nov. 1988.
• R. S. Muller, L. Fan, and Y. C. Tai, "Micromechanical elements and methods for their fabrication," U.S. Patent 4,740,410. April 1988.
• R. S. Muller and R. T. Howe, "Integrated circuit sensor," U.S. Patent 4,674,319. June 1987.
• R. S. Muller and D. L. Polla, "Integrated pyroelectric sensor and method," U.S. Patent 4,608,865. Sep. 1986.
• R. S. Muller and R. M. White, "Method and apparatus for sensing fluids using surface acoustic waves," U.S. Patent 4,361,026. Nov. 1982.
• R. S. Muller and L. K. Russell, "Lateral bipolar transistor for integrated circuits and method for forming the same," U.S. Patent 3,967,307. June 1976.
• L. K. Russell, T. T. Dao, and R. S. Muller, "Threshold switching integrated circuit and method for forming the same," U.S. Patent 3,943,554. March 1976.
• R. S. Muller and J. Conragan, "Integrated circuit with remotely driven switch and method," Sep. 1975.
• R. S. Muller and J. Conragan, "Integrated circuit with remotely driven switch and method," May 1973.
• R. S. Muller and J. Conragan, "Stress-strain transducer charge coupled to a piezoelectric material," U.S. Patent 3,585,415. June 1971.
• R. S. Muller and J. Conragan, "Piezoelectric-semiconductor, electromechanical transducer," U.S. Patent 3,351,786. Nov. 1967.