# Faculty Publications - Clark Nguyen

## Articles in journals or magazines

- Y. Xie, S. Li, Y. Lin, Z. Ren, and C. Nguyen, "1.52-GHz micromechanical extensional wine-glass mode ring resonators,"
*IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control*, vol. 55, no. 4, pp. 890-907, May 2008. - C. Nguyen, "MEMS technology for timing and frequency control,"
*IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control*, vol. 54, no. 2, pp. 251-270, Feb. 2007. - C. Nguyen, "MEMS technologies and devices for single-chip RF front-ends,"
*J. Microelectronics and Electronic Packaging*, vol. 3, no. 4, pp. 160-168, 2006. - M. U. Demirci and C. Nguyen, "Mechanically corner-coupled square microresonator array for reduced series motional resistance,"
*IEEE/ASME J. Microelectromechanical Systems*, vol. 15, no. 6, pp. 1419-1436, Dec. 2006. - J. R. Clark, W. Hsu, M. A. Abdelmoneum, and C. Nguyen, "High-Q UHF micromechanical radial-contour mode disk resonators,"
*IEEE/ASME J. Microelectromechanical Systems*, vol. 14, no. 6, pp. 1298-1310, Dec. 2005. - J. Wang, Z. Ren, and C. Nguyen, "1.156-GHz self-aligned vibrating micromechanical disk resonator,"
*IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control*, vol. 51, no. 12, pp. 1607-1628, Dec. 2004. - Y. Lin, S. Lee, S. Li, Y. Xie, Z. Ren, and C. Nguyen, "Series-resonant VHF micromechanical resonator reference oscillators,"
*IEEE J. Solid-State Circuits*, vol. 39, no. 12, pp. 2477-2491, Dec. 2004. - A. Wong and C. Nguyen, "Micromechanical mixer-filters ("mixlers"),"
*IEEE/ASME J. Microelectromechanical Systems*, vol. 13, no. 1, pp. 100-112, Feb. 2004. - K. Wang, A. Wong, and C. Nguyen, "VHF free-free beam high-Q micromechanical resonators,"
*IEEE/ASME J. Microelectromechanical Systems*, vol. 9, no. 3, pp. 347-360, Sep. 2000. - F. D. Bannon III, J. R. Clark, and C. Nguyen, "High-Q HF microelectromechanical filters,"
*IEEE J. Solid-State Circuits*, vol. 35, no. 4, pp. 512-526, April 2000. - K. Wang and C. Nguyen, "High-order medium frequency micromechanical electronic filters,"
*IEEE/ASME J. Microelectromechanical Systems*, vol. 8, no. 4, pp. 534-557, Dec. 1999. - C. Nguyen, "Frequency-selective MEMS for miniaturized low-power communication devices (Invited Paper),"
*IEEE Trans. Microwave Theory and Techniques*, vol. 47, no. 8, pp. 1486-1503, Aug. 1999.

## Articles in conference proceedings

- M. Akgul, R. Schneider, Z. Ren, G. Chandler, V. Yeh, and C. Nguyen, "Hot filament CVD conductive microcrystalline diamond for high Q, high acoustic velocity micromechanical resonators," in
*Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International*, 2011, pp. 1-6. - L. W. Hung, Z. A. Jacobson, Z. Ren, A. Javey, and C. Nguyen, "Capacitive transducer strengthening via ALD-enabled partial-gap filling," in
*Hilton Head 2008: A Solid-State Sensors, Actuators and Microsystems Workshop Technical Digest*, San Diego, CA: Transducer Research Foundation, 2008. - Y. Lin, W. Li, Z. Ren, and C. Nguyen, "A resonance dynamical approach to faster, more reliable micromechanical switches," in
*Proc. 2008 IEEE Intl. Frequency Control Symp. (IFCS '08)*, Piscataway, NJ: IEEE Press, 2008, pp. 640-645. - C. Nguyen, "Integrated Micromechanical Radio Front-Ends (Invited Plenary Talk)," in
*Proc. 2008 Intl. Symp. on VLSI Technology, Systems and Applications (VLSI-TSA '08)*, Hsinchu, Taiwan: Industrial Technology Research Institute, 2008, pp. 3-4. - W. Huang, Z. Ren, Y. Lin, H. Chen, J. Lahann, and C. Nguyen, "Fully monolithic CMOS nickel micromechanical resonator oscillator," in
*Proc. 21st IEEE Intl. Conf. on Micro Electro Mechanical Systems (MEMS 2008)*, Piscataway, NJ: IEEE Press, 2008, pp. 10-13. - N. Chen, R. Engelberg, C. Nguyen, P. Raghavendra, A. Rudra, and G. Singh, "Improved Approximation Algorithms for the Spanning Star Forest Problem," in
*APPROX-RANDOM*, 2007, pp. 44-58. - J. Wang, L. Yang, S. Pietrangelo, Z. Ren, and C. Nguyen, "RF MEMS resonators: Getting the right frequency and Q," in
*Proc. 2007 IEEE Compound Semiconductor Integrated Circuit Symp. (CSIC '07)*, Piscataway, NJ: IEEE Press, 2007, pp. 4 pg. - S. Li, Y. Lin, Z. Ren, and C. Nguyen, "A micromechanical parallel-class disk-array filter," in
*Proc. 2007 IEEE Intl. Frequency Control Symp. (IFCS '07)*, Piscataway, NJ: IEEE Press, 2007, pp. 1356-1361. - L. Hung, C. Nguyen, Y. Xie, Y. Lin, S. Li, and Z. Ren, "UHF micromechanical compound-(2,4) mode ring resonators with solid-gap transducers," in
*Proc. 2007 IEEE Intl. Frequency Control Symp. (IFCS '07)*, Piscataway, NJ: IEEE Press, 2007, pp. 1370-1375. - W. Huang, S. Li, Z. Ren, and C. Nguyen, "UHF nickel micromechanical spoke-supported ring resonators," in
*14th Intl. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2007). Digest of Technical Papers*, Piscataway, NJ: IEEE Press, 2007, pp. 323-326. - Y. Lin, L. Hung, S. Li, Z. Ren, and C. Nguyen, "Quality factor boosting via mechanically-coupled arraying," in
*14th Intl. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2007). Digest of Technical Papers*, Piscataway, NJ: IEEE Press, 2007, pp. 2453-2456. - Y. Lin, J. Wang, S. Pietrangelo, Z. Ren, and C. Nguyen, "Effect of electrode configuration on the frequency and quality factor repeatability of RF micromechanical disk resonators," in
*14th Intl. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2007). Digest of Technical Papers*, Piscataway, NJ: IEEE Press, 2007, pp. 2461-2464. - S. Li, Y. Lin, Z. Ren, and C. Nguyen, "An MSI micromechanical differential disk-array filter," in
- C. Nguyen, "Integrated micromechanical circuits fueled by vibrating RF MEMS technology (Invited)," in
*Proc. 2006 IEEE Ultrasonics Symp.*, M. Passini Yuhas, Ed., Piscataway, NJ: IEEE Press, 2006, pp. 953-962. - C. Nguyen, "Integrated Micromechanical Circuits for RF Front Ends (Plenary Talk)," in
*Proc. 32nd European Solid-State Circuits Conf. (ESSCIRC 2006)*, C. Enz, M. Declercq, and Y. Leblebici, Eds., Piscataway, NJ: IEEE Press, 2006, pp. 7-16. - C. Nguyen, "Microelectromechanical Systems (MEMS) for Frequency and Timing References (Tutorial Session)," in
*Proc. 2006 IEEE Intl. Frequency Control Symp. and Exposition (IFCS '06)*, Piscataway, NJ: IEEE Press, 2006, pp. nil19-19. - W. Huang, Z. Ren, and C. Nguyen, "Nickel vibrating micromechanical disk resonator with solid dielectric capacitive-transducer gap," in
*Proc. 2006 Intl. Frequency Control Symp. and Exposition (IFCS '06)*, Piscataway, NJ: IEEE Press, 2006, pp. 839-847. - Y. Lin, S. Li, Z. Ren, and C. Nguyen, "Third-order intermodulation distortion in capacitively-driven VHF micromechanical resonators," in
*Proc. 2005 IEEE Ultrasonics Symp.*, Vol. 3, Piscataway, NJ: IEEE Press, 2005, pp. 1592-1593. - Y. Lin, S. Li, Z. Ren, and C. Nguyen, "Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps (Best Frequency Control Paper Award)," in
*Proc. 2005 IEEE Intl. Frequency Control Symp. and Exposition (IFCS '05)*, Piscataway, NJ: IEEE Press, 2005, pp. 128-134. - C. Nguyen and J. Kitching, "Towards chip-scale atomic clocks (Jack Raper Award for Best Paper Award)," in
*2005 IEEE International Solid-State Circuits Conf. (ISSCC 2005). Digest of Technical Papers.*, Vol. 1, Piscataway, NJ: IEEE Press, 2005, pp. 84-85. - C. Nguyen, "Vibrating RF MEMS for next generation wireless applications (Best Invited Paper Award)," in
*Proc. IEEE 2004 Custom Integrated Circuits Conf.*, Piscataway, NJ: IEEE Press, 2004, pp. 257-264. - S. Lee and C. Nguyen, "Mechanically-coupled micromechanical resonator arrays for improved phase noise (Best Frequency Control Paper Award )," in
*Proc. 2004 IEEE Intl. Frequency Control Symp. and Exhibition*, Piscataway, NJ: IEEE Press, 2004, pp. 144-150. - Y. Xie, S. Li, Y. Lin, Z. Ren, and C. Nguyen, "UHF micromechanical extensional wine-glass mode ring resonators (Roger A. Haken Best Student Paper Award)," in
*2003 IEEE International Electron Devices Meeting (IEDM '03) Technical Digest*, Piscataway, NJ: IEEE Press, 2003, pp. 953-956.

## Patents

- C. Nguyen and S. Li, "High-Q micromechanical resonator devices and filters utilizing same," U.S. Patent 7,295,088. Nov. 2007. [abstract]
- C. T. Nguyen and Y. Xie, "Micromechanical resonator device having a desired mode shape," U.S. Patent 7,119,636. Oct. 2006.
- C. T. Nguyen, Y. Lin, S. Li, and Y. Xie, "Micromechanical structures having a capacitive transducer gap filled with a dielectric and method of making same," U.S. Patent Application. Aug. 2006.
- C. T. Nguyen and M. A. Abdelmoneum, "Micromechanical resonator device and method of making a micromechanical device," U.S. Patent 6,985,051. Jan. 2006.
- C. T. Nguyen and W. Hsu, "Mechanical resonator device having phenomena-dependent electrical stiffness," U.S. Patent 6,958,566. Oct. 2005.
- C. T. Nguyen and Y. Xie, "Low-voltage electromechanical device including a tiltable microplatform, method of tilting same, array of such devices and method of setting dimple-to-substrate spacing," U.S. Patent 6,954,301. Oct. 2005.
- C. T. Nguyen, "Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices," U.S. Patent 6,917,138. July 2005.
- J. R. Clark and C. T. Nguyen, "Micromechanical resonator device and micromechanical device utilizing same," U.S. Patent 6,856,217. Feb. 2005.
- W. Hsu, J. R. Clark, and C. T. Nguyen, "Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby," U.S. Patent 6,846,691. Jan. 2005.
- C. T. Nguyen and M. U. Demirci, "Filter-based method and system for measuring angular speed of an object," U.S. Patent 6,742,389. June 2004.
- W. Hsu and C. T. C. Nguyen, "Micromechanical resonator device," U.S. Patent 6,739,190. May 2004.
- C. T. Nguyen, "Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator," U.S. Patent 6,713,938. March 2004.
- C. T. C. Nguyen, "Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus," U.S. Patent 6,680,660. Jan. 2004.
- A. Wong and C. T. Nguyen, "Module and method of making same," U.S. Patent 6,667,558. Dec. 2003.
- J. R. Clark and C. T. Nguyen, "Micromechanical resonator device and micromechanical device utilizing same," U.S. Patent 6,628,177. Sep. 2003.
- C. T. Nguyen, "Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices," U.S. Patent 6,600,252. July 2003.
- C. T. Nguyen, "Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus," U.S. Patent 6,593,831. July 2003.
- C. T. Nguyen, "Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices," U.S. Patent 6,577,040. June 2003.
- A. Wong and C. T. Nguyen, "Metehod for making a module including a microplatform," U.S. Patent 6,569,754. May 2003.
- C. T. Nguyen, "Metehod and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus," U.S. Patent 6,566,786. May 2003.
- J. Yoon and C. T. Nguyen, "High-Q micromechanical device and method of tuning same," U.S. Patent 6,490,147. Dec. 2002.
- C. T. Nguyen, "Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device," U.S. Patent 6,424,074. July 2002.
- C. T. Nguyen, M. McCorquodale, and K. Wang, "Device including a micromechanical resonator having an operating frequency and method of extending same," U.S. Patent 6,249,073. June 2001.
- C. T. Nguyen and R. T. Howe, "Q-controlled microresonators and tunable electronic filters using such resonators," U.S. Patent 6,236,281. May 2001.
- C. T. Nguyen and K. Wang, "Method and system for locally annealing a microstructure formed on a substrate and device formed thereby," U.S. Patent 6,169,321. Jan. 2001.
- C. T. Nguyen and K. Wang, "Method and system for locally annealing a microstructure formed on a substrate and device formed thereby," U.S. Patent 5,976,994. Nov. 1999.
- C. T. Nguyen and R. T. Howe, "Q-controlled microresonators and tunable electronic filters using such resonators," U.S. Patent 5,955,932. Sep. 1999.
- C. T. Nguyen, V. Gutnik, and R. T. Howe, "Mixing, modulation and demodulation via electromechanical resonators," U.S. Patent 5,839,062. Nov. 1998.
- L. Lin, C. T. Nguyen, R. T. Howe, and A. P. Pisano, "Microelectromechanical signal processor fabrication," U.S. Patent 5,589,082. Dec. 1996.
- L. Lin, C. T. Nguyen, R. T. Howe, and A. P. Pisano, "Microelectromechanical signal processors," U.S. Patent 5,537,083. July 1996.
- C. T. Nguyen and R. T. Howe, "Q-controlled microresonators and tunable electronic filters using such resonators," U.S. Patent 5,491,604. Feb. 1996.
- L. Lin, C. T. Nguyen, R. T. Howe, and A. Pisano, "Microelectromechanical signal processors," U.S. Patent 5,455,547. Oct. 1995. [abstract]

## Ph.D. Theses

- L. Hung and C. Nguyen, "High-Q Low-Impedance MEMS Resonators," EECS Department, University of California, Berkeley, Tech. Rep. UCB/EECS-2012-218, Dec. 2012. [abstract]