Low Temperature Fabrication of Nickel Composite Film for MEMS Applications

Kwok-Siong Teh
(Professor Liwei Lin --ME)
BSAC

The focus of this project is to develop a nickel-composite film via a low temperature process that has superior mechanical and electrical properties for applications in RF MEMS.

Send mail to the author : (jhuggins@eecs.berkeley.edu)

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