List of Abstracts for Tsu-Jae King
The EECS Research Summary for 2003
As-Deposited Poly-SiGe MEMS Structure with Low Stress and Low Strain Gradient
Blake C.-Y. Lin
Planar Self-Aligned Double Gate Sub 50 nm MOSFETs
Sriram Balasubramanian
Capacitorless DRAM Technologies for High Density Memory Applications
Charles Kuo
Molybdenum Gate Work-Function Engineering for Ultra-Thin-Body Silicon-on-Insulator (UTB SOI) MOSFETs
Daewon Ha
Pushkar Ranade
Yang-Kyu Choi
Impact of Gate Process Technology on EOT of HfO
2
Gate Dielectric
Daewon Ha
Hideki Takeuchi
Excimer Laser Annealing for Reducing Gate Depletion Effects in Deep-Submicron CMOS Technologies
Hiu Yung Wong
Thin Silicon Nitride Layers for Abrupt Junctions
Katherine Buchheit
Effects of Process-Induced Variations on Asymmetric vs. Symmetric Double-Gate MOSFETs
Kyoungsub Shin
Sriram Balasubramanian
Hiu Yung Wong
Leland Chang
Selective SiGe CVD Process for Raised-S/D FinFET Application
Kyoungsub Shin
Industrial FinFET Fabrication Using Standard Processing Tools
Leland Chang
Contact Resistivity of p+ SiGe Deposited onto TiN
Marie-Ange Eyoum
Development of a Focused Ion Beam System for High-throughput Maskless, Direct Lithography
Qing Ji
Sub-10 nm FETs: Thin Body Back Gated Schottky Transistors
Varadarajan Vidya
Threshold Voltage Control at Double-Gate Devices
Yang-Kyu Choi
(14 abstracts total)