Contents of Chapter 7: Optoelectronics, Electromagnetics, and Plasmas

The EECS Research Summary for 2003

[Contents]
Title Author(s) Professor(s)
EUV/Soft X-ray Interferometry Kristine Rosfjord David T. Attwood
Nano-Resolution Zone Plate Microscopy Weilun Chao David T. Attwood
Buried Selectively-Oxidized AlGaAs Structures Grown on Nonplanar Substrates P. C. Ku Connie J. Chang-Hasnain
Semiconductor All-Optical Buffers P. C. Ku Connie J. Chang-Hasnain
Thermal Oxidation of AlGaAs: Modeling and Process Control P. C. Ku Connie J. Chang-Hasnain
Photo-Polymer Wafer Bonding for Transfer of GaN Heterostructures and Devices from Sapphire to Dissimilar Substrates Vorrada Loryuenyong Nathan W. Cheung
Low Temperature Si Layer Transfer by Mechanical Ion-Cut Yonah Cho Nathan W. Cheung
Characterization of Instabilities in Inductively Coupled Plasmas A. M. Marakhtanov Allan J. Lichtenberg
Michael A. Lieberman
Modeling Dual Frequency Capacitive Discharges Jisoo Kim
Sungjin Kim
Allan J. Lichtenberg
Michael A. Lieberman
Global Modeling of Time Modulated Electronegative Plasmas Sungjin Kim Allan J. Lichtenberg
Michael A. Lieberman
Particle Simulation of Dual Frequency Discharges for Materials Processing J. Hammel
A. Wu
John Verboncoeur --NE
Michael A. Lieberman
PIC Simulation of Magnetized DC Discharges Jeffrey Hammel John Verboncoeur --NE