Contents of Chapter 5: MEMS and Nanotechnology

The EECS Research Summary for 2003

Title	Author(s)	Professor(s)
MEMS Synthesis Using Stochastic Optimization	Raffi Kamalian	Alice M. Agogino --ME
Scanning Microscopy Probe for Nanomechanical Resonators	MinCheol Park Xuchun Liu	Jeffrey Bokor
Laser Beam Steering for MEMS Optical Communication Systems	Baris Cagdaser	Bernhard E. Boser
Background Calibration for Low-Power High-Performance A/D Conversion	Boris Murmann	Bernhard E. Boser
Electrostatic Actuator Design for a Digital Output Gyroscope	Joseph Seeger	Bernhard E. Boser
Strain Gauge on Steel: Electronic Interfaces for Resonant Sensors	Ken Wojciechowski	Bernhard E. Boser
ImmunoSensor	Turgut Aytur Tomohiro Ishikawa Jonathan Foley	Bernhard E. Boser
Electronic Interface for Micromachined Gyroscope Sensors	Vladimir P. Petkov	Bernhard E. Boser
MEMS Rotary Engine Power System / 2.4 mm Rotary Engine	Aaron Knobloch	Carlos Fernandez-Pello --ME Albert P. Pisano
Mini Rotary Engine Power System	John P. Dimer	Carlos Fernandez-Pello --ME Albert P. Pisano
Electrochemical Oxygen Microgenerator for Cell Culture	William J. Holtz Michel M. Maharbiz Sahar Sharizadeh	Roger T. Howe Jay D. Keasling --ChemE
Silicon Carbide-based Nanomechanical Filter Arrays	Di Gao Muthu B.J. Wijesundara Carlo Carraro	Roger T. Howe Roya Maboudian --ChemE
GHz Nano-Mechanical Resonators	Brian Bircumshaw	Roger T. Howe Oliver O'Reilly --ME Albert P. Pisano
Novel SiGe Processes for Electrostatically Actuated MEMS Resonators	Carrie W. Low Sherif Sedky	Roger T. Howe
Fluidic Microassembly for Microfluidic Applications	Frank Zendejas	Roger T. Howe
Electrical Interconnect of Components Transferred by Fluidic Microassembly Using Capillary Forces	Karen L. Scott Piotr Prokop	Roger T. Howe
Performance Comparison of Integrated Z-axis Frame Microgyroscopes	Moorthi Palaniapan	Roger T. Howe
Micromachined Electrodes for Capacitive Sensors	Noel Arellano	Roger T. Howe
Electromechanical Transduction for GHz Resonators	Sunil A. Bhave	Roger T. Howe
X-Axis Rate Gyroscope with Vertical Drive and In-Place Differential Sense	Sunil A. Bhave	Roger T. Howe
Microfluidic Cellular Manipulation for a Sample Preparation Microsystem	Dino Di Carlo	Luke P. Lee --BioE
Ultrasensitive, Fast, and Direct Detection of DNA Hybridization by Nanogap Dielectric Junctions	J. S. Lee S. Oh Y. Choi	Luke P. Lee --BioE
Theoretical Study of Nanogap Juction Measurement: Electrode Polarization and Dielectrophoretic Motion of DNA	J. S. Lee Y. Choi	Luke P. Lee --BioE
Disposable Integrated Microfluidic Optical Systems (iMOS) Integrated Optical MEMS and Microfluidic Channels for High Resolution Biochip Array	Jeonggi Seo	Luke P. Lee --BioE
XZR Multi-Degree of Freedom Vertical Comb Drive	K. H. Jeong	Luke P. Lee --BioE
Batch Fabrication of Nanopillars for Autonomous Nanofluidic Surface-Enhanced Raman Scattering (SERS) Arrays	Michael S. Pio	Luke P. Lee --BioE
Integrated Polymer Actuators in Microfluidic Systems	Nikolas Chronis	Luke P. Lee --BioE
A Multi-Stage Micro-Tangential Flow Filtration Device for BioMEMS Applications	Patrick P. Leung	Luke P. Lee --BioE
NanoLAPS (Light Addressable Pententiometric Sensor)	Qintao Zhang	Luke P. Lee --BioE
Vertically-Integrated Micro Confocal Imaging Array (VIm-CIA)	Sunghoon Kwon	Luke P. Lee --BioE
Electronic Properties of DNA for Bioelectronics	Yang-Kyu Choi	Luke P. Lee --BioE
Nanostructure Neural Interfaces	Yang-Kyu Choi Tim Kubow	Luke P. Lee --BioE
Design, Fabrication, and Testing of a MEMS Syringe	Boris Stoeber	Dorian Liepman --BioE
Characterization of Capillary Flows in Rectangular Microchannels	Shelly Gulati	Dorian Liepman --BioE
Continuous In-Vitro Minimal Invasive Micro Glucose Monitor	Stefan D. Zimmermann Doerte Fienbork	Dorian Liepman --BioE
Adhesion-based Cell Separation	Wesley Chang	Dorian Liepman --BioE
Reverse Capillary Action Constant Pressure Accumulation Device	Eric Hobbs	Liwei Lin --ME Albert P. Pisano
MEMS Strain Gauge on Steel: Testing Localized Silicon-Steel Bonds	Ted Prescop	Liwei Lin --ME Albert P. Pisano
Selective Induction Heating and Bonding	Andrew Cao	Liwei Lin --ME
MEMS Sensor for Hard Disk Glide Test	Jongbaeg Kim	Liwei Lin --ME
Ultrasonic Bonding for MEMS Hermetic Packaging and Assembly	Jongbaeg Kim Mu Chiao	Liwei Lin --ME
High Frequency MEMS Resonator for Wireless Communication Applications	Ki Bang Lee Steve Ryder	Liwei Lin --ME
Disposal Microbattery for MEMS Devices	Ki Bang Firas Sammoura	Liwei Lin --ME
Integrated Electrochemical Assay for Glucose/Lactate Detection	Kwok-Siong Teh	Liwei Lin --ME
Low Temperature Fabrication of Nickel Composite Film for MEMS Applications	Kwok-Siong Teh	Liwei Lin --ME
Micromachined Microbial Fuel Cells	Mu Chiao Kien B. Lam	Liwei Lin --ME
Integration of NEMS and MEMS by Localized Growth of Nanowires	Ongi Englander	Liwei Lin --ME
Micro Encapsulation Processes for Fluids	Sha Li	Liwei Lin --ME
Water-Powered Micropumps for Bioassay and Drug Delivery Systems	Yu-Chuan Su	Liwei Lin --ME
Silicon Carbide-Coated Microcomponents for the Rotary Engine-based Power System	M.B.J. Wijesundara C. Carraro	Roya Maboudian --ChemE Albert P. Pisano
3D Refractive Microlenses and Lenslets	Hyuck Choo	Richard S. Muller
MEMS, Segmented, Deformable Mirror for Adaptive Optics	Michael A. Helmbrecht	Richard S. Muller
Microsystems for Electrostatic Sensing	Patrick S. Riehl	Richard S. Muller
MEMS Strain Gauge on Steel: Non-linear Analyses of Resonant Strain Gauges	Todd A. Lauderdale	Oliver O'Reilly --ME Albert P. Pisano
MEMS Rotary Engine Power System/Engine Fluid Management System	Brenda Haendler	Albert P. Pisano
Integrated Nano Mechanically Regulated Atomic Clock	Carolyn D. White	Albert P. Pisano
MEMS Rotary Engine Power System/Dynamic Fuel Evaporator System	Chen-Li Sun	Albert P. Pisano
MEMS-Enhanced Laproscopic Tools	David Walther	Albert P. Pisano
MEMS Rotary Engine Power System/Soft Magnetic Pole Integration	Debbie G. Jones	Albert P. Pisano
MEMS Rotary Engine Power System/Apex Seal Design	Fabian Chavez Martinez	Albert P. Pisano
Microconnector	Helen Holder	Albert P. Pisano
Strain Gauge on Steel: Selective Strain Isolation	I-Yang Chen	Albert P. Pisano
MEMS Rotary Engine Power System/2.4 mm Air Powered Demonstration	Jack Yu	Albert P. Pisano
Low-Power, Low-Leakage Microvalve	Jeremy Frank	Albert P. Pisano
MEMS Rotary Engine Power System/Engine Seal Modeling	Josh Heppner	Albert P. Pisano
MEMS Strain Gauge on Steel: Resonant Sensor Design and Fabrication	Julian Lippmann	Albert P. Pisano
MEMS Rotary Engine Power System/1 mm Engine Design and Fabrication	Kelvin Fu	Albert P. Pisano
Pressure Driven Double-T Metering Section	Luke Hunter	Albert P. Pisano
NiTi Shape Memory Alloy (SMA) Films: Best Material for MEMs Actuators	Michael Vestel	Albert P. Pisano
MEMS Strain Gauge on Steel: Test Fixture Design	Robert Azevedo	Albert P. Pisano
Mechanical, Magnetic Flux Chopper for Integrated Nano Mechanically-Regulated Atomic Clock	Robin Liu James Porter	Albert P. Pisano
Ivy: A Sensor Network Infrastructure for the College of Engineering	Barbara Hohlt Jaein Jeong Lance Doherty	Kristofer S. J. Pister
Ultra-Low Energy Circuits for Distributed Sensor Networks (Smart Dust)	Brett Warneke Mike Scott Brian Leibowitz	Kristofer S. J. Pister
CMOS Imaging Receiver for Free-Space Optical Communication	Brian S. Leibowitz Jonathan Choy	Kristofer S. J. Pister
Algorithms for Position and Data Recovery in Wireless Sensor Networks	Lance Doherty Eric Shan	Kristofer S. J. Pister
Steered Agile Laser Transmitter (SALT)	Matthew Last Lixia Zhou	Kristofer S. J. Pister
Off-the-Shelf Distributed Robots (Cots-Bots)	Sarah Bergbreiter Thomas Cheng Jon Novak	Kristofer S. J. Pister
Microrobots	Seth Hollar Anita Flynn	Kristofer S. J. Pister
MEMS Rotary Engine Power System/Integrated Generator	Matthew Senesky	Seth R. Sanders
Corona MEMS for Wide Study Area Air Particulate Monitoring	Beelee Chua Zhihong Li	Norman Tien
RF Dielectric Fluid Immersed Silicon MEMS Tunable Capacitors	Daniel T. McCormick Dr. Zhihong Li	Norman Tien
Minimally Invasive MEMS-based Optical Coherence Tomography for In-Vivo Imaging	Daniel T. McCormick	Norman Tien
Integration of MEMS and PLC Components for Telecommunication Systems	J Provine Shun Yao	Norman Tien
Biomimetic Directional Microphone Diaphragm	Kyutae Yoo	Norman Tien
Tunable Inductors and Transformers Utilizing Electro-Thermal Vibromotors	Wen-Pin Shih Zhihong Li	Norman Tien
Design of a Smart Universal Game Board	Xuchun Liu	Norman Tien
A Variable Inductor Array Using Lateral-Contact Microrelays	Ye Wang	Norman Tien
Fabrication of a High Aspect Ratio Piezoelectric Microactuator	Jonathan D. Foster	Richard M. White
Microsphere Capture and Perfusion in Microchannels Using Flexural Plate Wave Structures	Justin P. Black	Richard M. White
Chemical Sensing with Smart Dust	Justin P. Black Thomas E. Oberheim	Richard M. White