The goal of this project is to design, fabricate, and test novel SiC nanomechanical filter arrays for integrated microwatt transceivers. In order to achieve this goal, a series of microfabrication techniques including deposition, etching, and metalization of poly-SiC films will be developed. In addition, the mechanical and electrical properties of the deposited SiC films will be characterized.
The goal of this project is to develop a facile method for the realization of SiC-coated Si and SiC-based components for MEMS-based micropower systems.