main photo of Jeffrey Bokor

Jeffrey Bokor

Professor, Associate Dean

Research Areas

Research Centers

Teaching Schedule (Spring 2016)


Received his B.S. degree in electrical engineering from MIT in 1975, and the M.S. and Ph.D. degrees in electrical engineering from Stanford University in 1976 and 1980, respectively. From 1980 to 1993, he was at AT&T Bell Laboratories where he did researched novel sources of ultraviolet and soft X-ray coherent radiation, advanced lithography, picosecond optoelectronics, semiconductor physics, surface physics, MOS device physics, and integrated circuit process technology. He held management positions as head of the Laser Science Research Department at Bell Labs in Holmdel, NJ, from 1987 to 1990, and head of the ULSI Technology Research Department at Bell Labs in Murray Hill, NJ, from 1990 to 1993. Dr. Bokor joined EECS in 1993, with a joint appointment at the Lawrence Berkeley National Laboratory (LBNL). In 2004, he was appointed as Deputy Director for Science at the Molecular Foundry at LBNL, a major new nanoscale science research center. His current research activities include novel techniques for nanofabrication, new devices for nanoelectronics, quantum information processing, extreme ultraviolet lithography, optical metrology, and Fourier optics. He is a fellow of IEEE, APS, and OSA.

Selected Publications