main photo of David Attwood

David Attwood

Professor in Residence Emeritus

Research Areas

  • Short wavelength electromagnetics; Soft X-ray microscopy; Coherence; EUV lithography


David Attwood received his Ph.D. in Applied Physics from New York University in 1972. He has been a Professor in Residence at UC Berkeley since 1989. He was co-founder of the Applied Science and Technology Ph.D. program. He has been faculty advisor for the undergraduate Engineering Physics program for 25 years. His research interests center on the use of short wavelength electromagnetic radiation, x-rays and extreme ultraviolet radiation in the 0.1-30 nm range. Applications of particular interest include element specific x-ray microscopy and EUV lithography. He and his students are active in the use of novel Fourier optics, image contrast techniques, and the development and use of coherent sources at these short wavelengths. At the contiguous Lawrence Berkeley National Laboratory, he was founding Director of the Center for X-Ray Optics (CXRO), and was first (1985-1988) Scientific Director of the Advanced Light Source (ALS). He is a Fellow Member of the American Physical Society and the Optical Society of America. He is author of Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications, (Cambridge University Press, 2000). His lectures are regularly broadcast live over the Internet and electronically archived, such as at, and

Selected Publications