EECS Joint Colloquium Distinguished Lecture Series

Wednesday, August 27, 2003
Hewlett Packard Auditorium, 306 Soda Hall
4:00-5:00 p.m.

Professor Tsu-Jae King

EECS Dept., UC Berkeley


Sustaining the Silicon Revolution in the 21st Century




Rapid advances in the semiconductor industry over the past several decades have enabled the explosive growth of information technology, so that it now affects virtually every aspect of life in modern society. Continual advancement will no doubt make this industry the most influential in the 21st century. Its success stems from its ability to steadily improve the functionality of an integrated circuit (IC) while reducing the cost per function, with each new generation of technology. To date, technological developments have focused primarily on downsizing the basic IC building block, the transistor. State-of-the-art IC technologies today employ transistors with feature sizes below 50 nanometers (nm), approaching some fundamental limits. This seminar will first discuss the prospects for continued transistor scaling, down to atomic dimensions. It will then discuss alternative approaches to improving the functionality and cost of silicon-based devices, as the era of transistor scaling draws to a close.


Tsu-Jae King received the B.S., M.S. and Ph.D. degrees in Electrical Engineering from Stanford University. She joined the Xerox Palo Alto Research Center as a Member of Research Staff in 1992, to research and develop thin-film transistor technologies for high-performance flat-panel display and imaging applications. In 1996 she joined the faculty of the University of California at Berkeley, where she is now a Professor of Electrical Engineering and Computer Sciences, and the Director of the UC Berkeley Microfabrication Laboratory. Her awards include the Ross M. Tucker AIME Electronics Materials Award (1992) for seminal work in polycrystalline silicon-germanium thin films, an NSF CAREER Award (1998) for research in thin-film transistor technology, and the DARPA Significant Technical Achievement Award (2000) for development of the FinFET. Her research activities are presently in advanced materials, processes and technology for nanometer-scale silicon-based integrated-circuits, large-area electronics, and micro-electromechanical devices. She has authored or co-authored over 200 publications and holds 12 U.S. patents.