|Berkeley Sensor and Actuator Center|
Location: 400 Cory Hall
Ongoing: Microfabrication at Berkeley - Video
The UC Berkeley Microfabrication Laboratory is a shared cleanroom facility that is used for research in semi-conductor devices and technology, micro-electromechanical devices and systems (MEMS), bioMEMS, optoelectronics, superconductive devices, and nanoelectronics. The laboratory is a recharge operation maintained by a full-time professional staff that offers specialized tools, process modules, and integrated processes to academic and industrial researchers. The Microlab presently has over 350 active members; more than half of this membership originates in departments other than EECS.
The Berkeley Sensor & Actuator Center (BSAC) is the National Science Foundation Industry/University Cooperative Research Center for Microsensors and Microactuators. With more than 100 researchers, BSAC is the largest single set of Microlab members. BSAC researchers use the Microlab and their own research facilities to conduct industry-relevant, interdisciplinary research on micro- and nano-scale sensors, moving mechanical elements, microfluidics, materials, and processes that take advantage of progress made in integrated-circuit, bio, and polymer technologies. BSAC research projects stimulate cross disciplinary research and attract Microlab members from Bioeng, Chemistry, Chemical Eng, Materials Science and Eng, Mechanical Eng, and Physics.
During 2009, the Berkeley Microlab will migrate to the Marvell Nanofabrication Laboratory in the New Sutardja-Dai Hall (CITRIS Building). Construction is scheduled for completion in January 2009. The Marvell Lab will replace and significantly expand the capabilities of the present Microlab.