Berkeley EECS Annual Research Symposium
Electrical Engineering and Computer Science College of Engineering UC Berkeley










Things to Do in Berkeley

BEARS 2005
BEARS 2004

The UC Berkeley Microfabrication Laboratory (Microlab) and Berkeley Sensor and Actuator Center (BSAC) Open House

3:00 - 5:00pm, 400 Cory Hall






Microfabrication at Berkeley - Video

Berkeley Sensor and Actuator Center - Select Research Project Posters

Plans for the CITRIS Nanofabrication Center- Slideshow Q/A Lobby and Window Tour

The UC Berkeley Microfabrication Laboratory is a shared cleanroom facility that is used for research in semiconductor devices and technology, micro-electromechanical devices and systems (MEMS), bioMEMS, optoelectronics, superconductive devices, and nanoelectronics. The laboratory is a recharge operation maintained by a full-time professional staff, which offers specialized tools, process modules, and integrated processes to academic and industrial researchers. The Microlab presently has over 350 active members; more than half of this membership originates in departments other than EECS. With more than 100 researchers, BSAC is the largest single set of Microlab members. The Berkeley Sensor & Actuator Center (BSAC) is the National Science Foundation Industry/University Cooperative Research Center for Microsensors and Microactuators. BSAC researchers use the Microlab and their own research facilities to conduct industry-relevant, interdisciplinary research on micro- and nano-scale sensors, moving mechanical elements, microfluidics, materials, and processes that take advantage of progress made in integrated-circuit, bio, and polymer technologies. BSAC research projects stimulate cross disciplinary research and attract Microlab members from Bioengineering, Chemistry, Chemical Engineering, Materials Science and Engineering, Mechanical Engineering, and Physics.

The New CITRIS Nanofabrication Center (CNC)

UC Berkeley was selected to lead the Center for Information Technology Research in the Interest of Society (CITRIS), one of four California Institutes of Science and Innovation. Complete information on CITRIS can be found at: . A key component of this Center is a new world-class nanofabrication facility – the CITRIS Nanofabrication Center. The CNC will replace and significantly expand the capabilities of the present Microlab. New capabilities include MOCVD for integration of optoelectronic devices, expanded electroplating and chemical mechanical polishing for forming copper interconnects and general access e-beam lithography. Construction of the new CITRIS building has begun; move-in is anticipated in 2008. The CNC is soliciting donations for process equipment, service contracts, and infrastructure. Please contact The Microlab Technology Manager, Dr. Bill Flounders,, if your company would like to showcase unique capabilities in the CNC.

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