David Attwood

Professor in Residence
Interests

Electromagnetics at short wavelengths, particularly soft x-ray and extreme ultraviolet radiation, x-ray optics, the generation of coherent radiation at EUV and soft x-ray wavelengths, and applications to microscopy and lithography.

Classes Taught

  1. Synchrotron Radiation for Material Science Applications (http://www.coe.berkeley.edu/AST/srms)
    Offered in Spring semester 2007, this class is broadcast live over the Internet.
    Check the above website for more information.

  2. Soft X-rays and Extreme Ultraviolet Radiation (http://www.coe.berkeley.edu/AST/sxreuv)
    This class was broadcast live over the Internet in 2002, 2004 and 2005.

Recent Students and Research Areas

Dr. Weilun Chao (Lawrence Berkeley National Lab), "Resolution Characterization and Nanofabrication for Soft X-ray Zone Plate Microscopy ", EECS (Ph.D. 4/2005)
Dr. Kristine Rosfjord (University of Maryland), "Tunable Coherent Radiation at Soft X-ray Wavelengths: Generation and Interferometric Applications," EECS (Ph.D. 12/2004)
Dr. Yanwei Liu (UC Berkeley), "Coherence Properties of EUV/Soft X-ray Sources," AS&T (Ph.D. 12/2003)
Dr. Chang Chang (Drexel University), "Coherence Techniques at EUV Wavelengths," EECS (Ph.D. 12/2002)
Dr. John Heck (Intel), "Optics for High Resolution X-ray Microscopy," Applied Science and Technology. (M.S. 6/1997)
Dr. Gregory Denbeaux (Albany University), "Soft X-ray Biomicroscopy". (with Prof. John Madey, Duke University, and Dr. Werner Meyer-Ilse, LBNL)
Dr. Regina Soufli (Lawrence Livermore National Lab), "Optical Constants of Materials in the EUV/Soft X-ray Region for Multilayer Mirror Applications," EECS. (Ph.D. 12/1997)
Dr. Raul Beguiristain (Adelphi Technology), "Thermal Distortion Effects on Beam Line Optical Design for High Flux Synchroton Radiation," Nuclear Engr. (Ph.D. 12/1997)
Dr. Max Wei (Intel), "Grating Based Soft X-ray Spatial Frequency Multiplication," EECS. (Ph.D. 6/1995)
Dr. Khanh Nguyen (Google), "Reflective Masks for Extreme Ultraviolet Lithography," EECS. (Ph.D. 6/1994)
Mr. Jason Dimkoff (Sandia National Lab), "Spectrographic Study of the EUV Electric Capillary Discharge Source," EECS. (M.S. 5/02)

Sample Publications

  1. D. Attwood, "Nanotomography comes of Age", Nature 442, 642 (10 August 2006).
  2. G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Lorotonda, B. M. Luther, M. C.Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, "Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light", Opt. Lett. 31, 1214 (2006).
  3. C. Chang, A. Sakdinawat, P. Fischer, E. Anderson, and D. Attwood, "Single-element Objective Lens for Soft-X-Ray Differential Interference Contrast Microscopy", Opt. Lett. 31, 1564 (2006).
  4. P. Fischer, D.H. Kim, W. Chao, J.A. Liddle, E.H. Anderson, and D.T. Attwood. "Imaging nanomagnetism with X-ray microscopy", Materials Today 9, 26 (Jan-Feb 2006)
  5. W. Chao, B.H. Harteneck, J.A. Liddle, E.H. Anderson, D.T. Attwood. "Soft X-ray Microscopy at Spatial Resolution Better than 15 nm," Nature 435, 1210 (2005).
  6. K. Rosfjord, Y. Liu and D. Attwood, "Tunable Coherent Soft X-rays," IEEE JSTQE 10, 1405 (2004).
  7. R. Bartels et al., "Generation of Spatially Coherent Light at Extreme Ultraviolet Wavelengths", Science 297, 376 (2002).
  8. Y. Liu et al., "Achievement of Essentially Full Spatial Coherence in a High-Average-Power Soft X-ray Laser," Phys. Rev. A 63, 033802(2001).
  9. D. Attwood et al., "Tunable Coherent Radiation in the Soft X-ray and Extreme Ultraviolet Spectral Regions," IEEE J. Quant. Electr. 35, 709 (1999).
  10. D. Attwood et al., "At-Wavelength Metrologies for Extreme Ultraviolet Lithography" (in Japanese), J. Fut. Electr. Dev. (Tokyo) 8, 17 (1997).
  11. D. Attwood, "New Opportunities at X-ray Wavelengths," Physics Today, p. 24 (August 1992).
  12. D. Attwood, K. Halbach and K.-J. Kim, "Tunable Coherent X-rays," Science 228, 1265 (14 June 1985).
  13. J. Underwood and D. Attwood, "The Renaissance of X-ray Optics," Physics Today, p. 44 (April 1984).

Books

  1. D. Attwood, Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge University Press, 1999)
  2. W. Meyer-Ilse, T. Warwick and D. Attwood, Editors, X-ray Microscopy (Amer. Instit. Physics, Washington D.C., 2000)
  3. F. Zernike and D. Attwood, Editors, EUV Lithography (OSA, Washington D.C., 1995)
  4. D. Attwood and J. Bokor, Editors, Short Wavelength Coherent Radiation (Amer. Instit. Physics, N.Y., 1986)
  5. D. Attwood and B. Henke, Editors, Low Energy X-ray Diagnostics (Amer. Instit. Physics, N.Y., 1981)


You can reach me at: attwood@eecs.berkeley.edu

For further information contact: The Center for X-Ray Optics at Lawrence Berkeley National Laboratory. DTAttwood@lbl.gov